ZZS box-based vacuum-plugging machine ZZS800
• A box-type structure with the vacuum system at the rear facilitates operation and maintenance. The flat exterior is easy to clean and particularly suitable for through-wall installation in a cleanroom. • The vacuum system has a high pumping speed, providing short evacuation times, high vacuum and short production cycles. • Tubular heaters provide baking with uniform temperature and long service life. The maximum baking temperature is 350℃, and the stated baking uniformity is 270℃±10℃. • Workpiece rotation is driven from the upper center, with water-cooled bearings and magnetic-fluid seals for smooth, reliable operation. • A quartz-crystal film-thickness controller enables automatic control of the coating process. • The equipment uses an optimized coating-control system with an attractive, practical operator interface, providing stable, reliable manual, semiautomatic and fully automatic operation.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Box size [Model: ZZS800; Common Standard Configuration] | Φ800x900 |
| Vacuum systems - limit vacuum [Model: ZZS800; Common Standard Configuration] | ≤3.0×10⁻⁴ |
| Vacuum systems -- restoration of vacuum [Model: ZZS800; Common Standard Configuration; Reactivate Vacuum Whole Retention] | 4×10⁻³Pa ≤15min |
| Vacuum system -- recommended configuration [Model: ZZS800; Common Standard Configuration] | Molecular and direct pumps |
| Vacuum system - Optional configuration [Model: ZZS800; Common Standard Configuration; Selection Original] | A. Low temperature and direct-link pumps; B. proliferation and direct-link pumps |
| Vacuum measurement [Model: ZZS800; Common Standard Configuration; Ploting and Selection Ranges retained respectively] | Atmosphere~1×10⁻⁵Pa (standard); atmosphere~1×10⁻⁷Pa (optional) |
| Low temperature trapper [Model: ZZS800; common standard configuration; recommended addition with molecular-pump or diffusion-pump configurations; with cryopump configurations, depends on the process] | Match |
| Work packages [Model: ZZS800; Common Standard Configuration] | Sphere (marking); sector (select) |
| Baking. [Model: ZZS800; Common Standard Configuration] | Baking (coding); baking (choice-making) |
| Project baking system [Model: ZZS800; Common Standard Configuration] | Bread, pipe-like heater, maximum temperature 350°C, PID automatic temperature control and display |
| evaporation system - EPR source [Model: ZZS800; Common Standard Configuration; Selection] | 4kw/group (selection) |
| Vapour system - Electronic beam evaporation source - multi-clause [Model: ZZS800; common standard configuration; standard; pocket-crucible capacity 12cc/pocket, with selectable 20cc or 40cc capacities] | 8 dens (marks) |
| Vapour system - E-beam evaporation source - dentex capacity [Model: ZZS800; common standard configuration; Note: **: 12cc/cave standard, 20cc or 40cc selected capacity] | 12cc/closure; options 20cc, 40cc |
| Imbrane thickness monitoring system -- Stone crystal membrane thicker [Model: ZZS800; Common Standard Configuration] | Single probe (marking); six probe (selection) |
| Membrane thickness monitoring system -- optical membrane thickness control unit [Model: ZZS800; Common Standard Configuration; Selection; Type and Wave Original Whole] | Back-to-back, 400 ~ 1100 nm (selection) |
| Ion Support [Model: ZZS800; Common Standard Configuration; Selection] | Hal Ion, Kaufman Ion. |
| Inflating system - pressure [Model: ZZS800; Common Standard Configuration; Selection] | ≤0.1 MPa |
| Inflating system - flow [Model: ZZS800; Common Standard Configuration; Selection; ≤0.1 MPa] | 0~100sccm、0~200sccm |
| Energy requirements -- electricity [Model: ZZS800; common standard configuration; three-phase five-wire; calculated for the standard configuration] | ~25 kw |
| Energy requirements - cooling water temperature [Model: ZZS800; common standard configuration; note **** all calculated according to standard configuration, with different configurations confirmed with sales personnel] | 20°C~28°C |
| Energy requirements - cooling water flows [Model: ZZS800; common standard configuration; 20°C~28°C; calculated for the standard configuration] | 60 L/min |
| Energy requirements - compressed air [Model: ZZS800; Common Standard Configuration] | 0.4MPa~0.8MPa |
| Overall Dimensions (W×H×D) [Model: ZZS800; common standard configuration; note**** all calculated according to standard configuration, with different configurations confirmed with the salesman; table unprinted, not completed mm] | 2100×1900×2002 |
| Total equipment weight [Model: ZZS800; Common Standard Configuration] | 1800 KG |
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