GFC series high performance fully automated vacuum plating machine
The high-performance, fully automated, vacuum-plugging machine of the GFC series is a evaporating or splattering material (e.g. metal or compound) in a vacuum environment, which is used to form a thin film on the base material surface.
Save to Favorites
Overview
Specifications
| Parameter | Value |
|---|---|
| Vacuum chamber | Ø1300*1450mm, SUS304 materials φ1,300*1,450mm, SUS304 material |
| Air exhaust system [Total exhaust rate: loading water cold; exhaust time: atmospheric 4.0 E-3Pa] | 2 KT-500 diffusion pumps; total exhaust rate with a water-cooled trap fitted: 11,000Pa.L/S. Ultimate vacuum≤2.0E-4Pa; evacuation time≤15min (atmosphere→4.0E-3Pa) |
| Base frame [Planetary base frame, flipping agency, etc.: optional] | Ø1200 four-blade sector-shaped substrate holder, rotation speed 3～30rpm; optional planetary substrate holder or turnover mechanism |
| Heating means [Temperature uniformity: after 20min at constant temperature] | Maximum 350℃, PID control; temperature uniformity 250±10℃ after 20min at constant temperature |
| Quartz monitor | Imported quartz-crystal film-thickness monitor; 2-point (or 6-point) crystal probe |
| Electronic beam evaporation source | Two 10KW electron guns, with a 12-point crucible and an annular crucible. Two 10KW electron guns, with a 12-point crucible or an annular crucible. |
| Resistance evaporation source [One pair, two pairs or more.] | Power: 4KW (one pair, two pairs or more pairs) |
| Flims thickness revision board | 2 automatic collapsible film-thickness correction mechanisms |
| Reaction gas | APC autopressure controller, mass flowometer |
| Ion source [Optional] | Aveilable for match-making of Kafman, Holl or RF ion source |
| Low temperature extraction equipment | Imported low-temperature evacuation equipment effectively traps water vapor; minimum temperature -130℃ |
| RCS system RCS system | Windows-based fully automated coaling software |
| Control system | Control cabinet (Little Crystal Touch colour monitor), remote control box |
| Energy consumption [220/380VAC,50Hz; ~70KVA: 3-phase] | 3-phase, 220/380VAC,50Hz; ～70KVA. Water flow 140L/min, pressure 0.3~0.5MPa. Compressed air 0.5MPa~0.7MPa |
| Heavy Weight | Net weight approximately 4500Kg |
| Install Space | W4000mmxD6000mmxH2700mm W4,000mm×D6,000mm×H2,700mm |
Applications
Key Features
Datasheet
Supplier Information
Related Products
-
Ultrasonic Cleaning System
Optical Production Equipment
Trusee
-
Ultraprecision Ironless Linear Motor TUP Series
Optical Production Equipment
Xzyim
-
XHS-14
Optical Production Equipment
Xzyim
Input Beam Spot: 14 mm Mirror Type: Si, Qu Following Error: 0.20 ms
-
XHS-30
Optical Production Equipment
Xzyim
Input Beam Spot: 30 mm Mirror Type: Si, Qu Following Error: 0.54 ms
-
XHS-20
Optical Production Equipment
Xzyim
Input Beam Spot: 20 mm Mirror Type: Si, Qu Following Error: 0.34 ms
Related Articles
An infrared transmitter (IR transmitter) is a basic electronic component that sends invisible infrared light signals for short-range wireless control. It is widely used in daily electronics, smart home devices, and industrial equipment due to its low cost, low power consumption, and stable performance.
In photonics and laser technology, devices that manipulate optical signals via the electro-optic effect form the backbone of precision optical systems. Electro-optic phase modulators and electro-optic deflectors are two prominent examples of this device category. As a critical hardware solution for high-speed, high-accuracy laser beam direction control, electro-optic deflectors are widely deployed across industrial and research settings. Below is a detailed overview of their core structure, key performance drivers, and primary use cases.
Founded in 2019, Jilin JC Ultrafast Equipment Co., Ltd. is a high-tech enterprise incubated by the Ultrafast Optoelectronics Center of Jilin University. Our R&D team owns 15 years of profound experience in femtosecond laser micro-nano fabrication.
Wuhan Optical Valley Interlink Technology Co., Ltd. was founded in 2013 by a technical team from Huazhong University of Science and Technology.
Loading...
Name
Phone
Organization
Use Case
Database Platform