High-Precision Diaphragm Air Spring
This high-precision diaphragm air spring provides passive vibration isolation, using compressed air as the elastic medium without electrical control. Its low natural frequency effectively filters ground vibration, providing stable operation without electromagnetic interference. It is commonly used with leveling valves for optical tables, coordinate measuring equipment and semiconductor inspection systems. As a passive pneumatic isolation element, it provides elastic support through compressed air inside a sealed airbag, requiring no external electrical drive. It is a core component in passive isolation systems for precision equipment. Its sealed diaphragm structure gives it an extremely low natural frequency, efficiently isolating ground disturbances and attenuating high-frequency vibration transmitted to equipment. It operates smoothly, with no electromagnetic interference and high reliability. The spring is widely used with marble optical tables, coordinate measuring machines and semiconductor inspection equipment, commonly together with a level control valve (Levelling Valve), to provide a stable passive isolation environment for metrology and optical inspection equipment.
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