MR Series Compact Fast-Steering Mirrors MR-15-30 MR-15-30-G-25x25D
The compact fast steering mirror uses one optical element to combine a large aperture with wide tilt angles for true two-dimensional beam steering, reducing reflection loss, eliminating beam offset and simplifying system design. With a camera, it expands the field of view. Robust voice-coil actuation and real-time optical feedback provide precise, repeatable motion control. The MR-15-30 dual-axis fast steering mirror suits applications requiring large deflection in a compact volume. Its mirror size is 15 mm and housing diameter only 30 mm; mechanical tilt of ±25° corresponds to a 100° optical field of view (FOV). Built-in position feedback enables precise control through a standard PID controller, meeting wide-field applications needing mirrors larger than most MEMS micromirrors. Based on established voice-coil technology, its virtual pivot lies closer to the mirror surface than in conventional galvanometer systems. Available coatings include protected gold, visible dielectric and protected silver. Applications include skin scanners, laser dermatology, IVF incubators, laser processing, quality control, barcode scanners, semiconductor/electronics inspection, lidar scanners and free-space communications. Model overview: Model | mirror size (mm) | tilt angle (°) | full-range bandwidth (Hz) | resolution (μrad) | repeatability RMS (μrad) | position feedback. MR-15-30 | 15 | ±25 | 20 | 22 | 44 | Yes. *All angles are mechanical angles. Standard product overview: Model | mirror size (mm) | mirror coating | typical wavelength range. MR-15-30-PS-25x25D | 15 | visible dielectric | 400 - 2000. MR-15-30-DVIS-25x25D | 15 | protected gold | 400 - 700. MR-15-30-G-25x25D | 15 | protected silver | 800 - 2000. Temperature sensor: NXP LM75B or equivalent, I²C address 0x48 including read/write bits. EEPROM: M24C08 or equivalent, I²C address 0x50–0x53 including read/write bits.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Driver Type [X Axis 、Y Axis] | Voice-coil drive |
| Mechanical Tilt Angle [X Axis 、Y Axis] | ±25° Circular FOV |
| Mirror Diameter [X Axis 、Y Axis] | 15.0 mm |
| Distance from Rotation Center to Mirror Surface [X Axis 、Y Axis] | 1.3 mm |
| Housing Diameter [X Axis 、Y Axis] | 30.0 mm |
| Height [X Axis 、Y Axis] | 14.5 mm |
| Weight [X Axis 、Y Axis] | 29.3 g |
| Mechanical Mounting [X Axis 、Y Axis] | 4 × M2 screws |
| Magnetic Shielding [X Axis 、Y Axis] | Present |
| Zero Drift [X axis, Y axis; RMS over the entire field of view] | typical:30 µrad/K (RMS over the entire field of view) |
| Sensor Resolution [X axis, Y axis; 14-bit ADC] | 22 µrad (14-bit ADC) |
| Repeatability [X axis, Y axis; RMS over the entire field of view at room temperature] | 40 µrad (RMS over the entire field of view at room temperature) |
| Calibration Accuracy (Maximum / Typical) [X axis, Y axis; maximum / typical; RMS over the entire field of view] | typical:0.15° / 0.08° (2.6 mrad / 1.4 mrad, RMS over the entire field of view) |
| Static Motor Constant [X axis, Y axis; full linearized range] | 3 rad/A (full linearized range) |
| Dynamic Motor Constant [X axis; full linearized range] | typical:20 krad/(A·s²) (full linearized range) |
| Dynamic Motor Constant [Y axis; full linearized range] | typical:35 krad/(A·s²) (full linearized range) |
| Resonant Frequency [X Axis] | 11–13 Hz |
| Resonant Frequency [Y Axis] | 15–18 Hz |
| Full-Scale Bandwidth [X Axis 、Y Axis ； Sine Wave ±25°] | 20 Hz （ Sine Wave ±25°） |
| Small-Signal Bandwidth [X axis; sine wave ±0.1°, single axis] | 300 Hz (sine wave ±0.1°, single axis) |
| Small-Signal Bandwidth [Y axis; sine wave ±0.1°, single axis] | 400 Hz (sine wave ±0.1°, single axis) |
| Small-Angle Step Settling Time (0.1° Step) [X Axis 、Y Axis] | typical:2–2.5 ms（ typical ） |
| Large-Angle Step Settling Time (10° Step) [X Axis 、Y Axis] | typical:8 ms（ typical ） |
| Reflectance [Protected Gold ; Average ;800 nm < λ < 2 μm;45° Angle of Incidence] | 95% |
| Reflectance [Protected Silver ; Average ;450 nm < λ < 2 μm;45° Angle of Incidence] | 96% |
| Reflectance [Visible dielectric coating; average; 450 nm < λ < 650 nm; 45° ± 25° angle of incidence] | 97% |
| Surface Quality [ISO 10110] | 5/ 5x0.4; L1x0.06; C3x0.25; E 0.25 @ 60-40 scratch-dig (ISO 10110) |
| Mirror Flatness λ [P-V；549 nm；ISO 10110] | λ/2 P-V @ 549 nm（ISO 10110） |
| Control Interface | Analog interface for coil drive and feedback readout |
| Maximum Continuous Current [RMS; single axis; per coil] | 0.37 A |
| Maximum Continuous Current [RMS; both axes simultaneously; per coil] | 0.26 A |
| Peak Current [10ms Pulse] | 2 A (10 ms Pulse ) |
| Maximum Average Drive Power [Sum of both coils] | 1.5 W (sum of both coils) |
| Coil Resistance | typical:11 Ω（ typical ） |
| Coil Inductance | typical:6 mH（ typical ） |
| Position Sensor Supply Current [1.5V] | 40 mA （@1.5 V） |
| Position Sensor Output Current | typical:0.1 mA （ typical ） |
| Position Sensor Operating Wavelength | 850 nm |
| Operating Temperature | -20 - +85 °C |
| Storage Temperature | -40 - +85 °C |
| Mechanical Shock [15ms；ISO 9022-3-30-07-1] | 105 g, 15 ms (compliant with ISO 9022-3-30-07-1) |
| Vibration [20–150Hz；ISO 9022-3-37-02-0] | 2.6 g, 20–150 Hz (compliant with ISO 9022-3-37-02-0) |
| Cycle Life | ＞2 × 10⁹ cycles |
Applications
Key Features
Datasheet
Supplier Information
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