Three-Dimensional Laser Direct-Writing Equipment for Photonic Chips PROME-Photonic
Prome-Photonic is a high-performance laser direct-writing system for photonic wire bonding(PWB) in photonic-chip integration. Nanoscale 3D fabrication and precise positioning/alignment address accurate cross-layer interconnection and heterogeneous packaging in three-dimensional photonic-chip integration. Multi-Photon Polymerization(MPP) enables true three-dimensional fabrication of submicron freeform structures, providing an important manufacturing platform for hybrid integration of silicon-photonic chips, lithium-niobate photonic circuits, and quantum-optical devices.
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Overview
Prome-Photonic is a high-performance laser direct-writing system for photonic wire bonding(PWB) in photonic-chip integration. Nanoscale 3D fabrication and precise positioning/alignment address accurate cross-layer interconnection and heterogeneous packaging in three-dimensional photonic-chip integration. Multi-Photon Polymerization(MPP) enables true three-dimensional fabrication of submicron freeform structures, providing an important manufacturing platform for hybrid integration of silicon-photonic chips, lithium-niobate photonic circuits, and quantum-optical devices.
Key Features
Ultrahigh-speed processing module greatly improves productivity. Precision 3D fabrication of complex structures and arbitrary freeform surfaces. Confocal/fluorescence detection for precise position recognition/alignment. Automatic three-dimensional alignment/positioning with nanometer precision. Real-time HD microscopic imaging/measurement and a global coordinate system for processing/inspection. Stabilized laser energy ensures long-duration consistency. Vacuum sample stage accommodates diverse substrates. Dedicated fixtures for fibers, fiber arrays and photonic chips. Automatic laser-power compensation eliminates effects of end-face fabrication defects. Automatic substrate-tilt detection/leveling. Visual programming with customizable workflows.
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Supplier Information
Moji Nano Technology is a high-tech enterprise specializing in three-dimensional micro-nano manufacturing, integrating R&D, production, sales and service of three-dimensional lithography, micro-nano 3D printing, micro-nano processing, two-photon processing, femtosecond laser processing, maskless lithography and other equipment. It is a provincial-level specialized and sophisticated enterprise. The R&D team has more than ten years of experience in ultrafast laser micro-nano 3D manufacturing, providing integrated solutions. The company has launched ultrafast laser micro-nano processing center, maskless direct writing lithography equipment, 3D micro-nano processing/nano 3D printing equipment, among which the nano-scale 3D laser direct writing lithography system achieves 50nm precision processing. Products are applied in biomedical, optical communication, new materials, micro-nano devices, aerospace and other fields.
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