PLD20L Excimer Laser PLD50L
Single-pulse energy up to 800mJ
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Single-Pulse Energy [ArF；193nm] | 400 mJ |
| Maximum Single-Pulse Energy [KrF；248nm] | 800 mJ |
| Maximum Single-Pulse Energy [XeCl；308nm] | 500 mJ |
| Average Power [ArF；193nm] | 15 W |
| Average Power [KrF；248nm] | 33 W |
| Average Power [XeCl；308nm] | 20 W |
| Maximum Repetition Rate | 20 Hz |
| Pulse Width (FWHM, ns) | 25±5 ns |
| Spot Size (mm)(V*H) | （26±1）×（9±1） |
| Energy Stability (sigma,% ) [sigma; measured at 248nm output] | 1 % |
| Divergence (mrad2)(V*H) | ~3×1 |
| Cooling Method | Water Cooling |
| Interaction-Control System | RS232 (LCD/PC) |
| Interaction-External Trigger | Electrical Signal |
Applications
Key Features
Datasheet
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