SUPERSCAN V Series Fully Digital Feedback Scanning Galvanometer SS V-15
SUPERSCAN V‑15 is a flagship galvanometer with fully digital feedback and a digital encoder for continuous mirror-position and velocity monitoring, operational data logging, and fault diagnosis. SL2‑100 supports20bit positioning resolution. Extremely low noise and temperature drift enable sharp-corner trajectories. With IP65 protection and water cooling, it targets the highest level of precision micromachining. SS V-15 series positioning: fully digital feedback, high precision (micromachining flagship). Storage temperature: as specified in the datasheet, not separately listed. This Page's Mirror Material/Wavelength Configurations (Not Parameters): 355 nm(UV):SC, QU 405 nm:QU 420–480 nm:— 425–465 nm + AL:— 515 nm:— 515–532 nm + AL:— 532 nm(Green):SC, QU 900–1100 nm + AL:— 1064 nm(Fiber):SC, QU 1020–1040 nm(>3 kW High Power):— 1060–1080 nm(>3 kW High Power):— 1060–1090 nm + AL:— 10.6 μm(CO₂):SC AG(Aluminum Substrate Type):SC The comparison object in the other column on this page is SS IV-30 (large spot, high power), rather than SS V-30. Its reference information follows: Series Positioning:High-Dynamics, High-Speed Processing (30 mm Large Spot) Supply Voltage:30 V or 48 V Current:2 A RMS,Maximum 5 A Ripple / Noise:≤300 mVpp @20 MHz Interface Signals:Digital:XY2-100 Enhanced + SL2-100 Operating Temperature:+15 ℃ ~ +35 ℃ Storage Temperature:−10 ℃ ~ +60 ℃ Humidity / Protection:≤80% Non-condensing / IP64 Typical Deflection Angle:±0.393 rad Resolution XY2-100-E (16 bit):12 μrad Resolution SL2-100 (20 bit):0.76 μrad Positioning Repeatability (RMS):<2.0 μrad Positioning Noise (RMS):<3.2 μrad Temperature Drift — Gain:15 ppm/K Temperature Drift — Position:10 μrad/K 8 h Long-Term Drift (Without Water Cooling):<60 μrad 8 h Long-Term Drift (With Water Cooling):<40 μrad Input Aperture [mm]:30 Beam Displacement [mm]:36.0 (SC) / 35.4 (QU) Weight (Without Lens)[kg]:≈5.5(Stainless-Steel Housing ≈12.0) Dimensions L×W×H [mm]:203.0×159.0×150.0 355 nm(UV):— 405 nm:— 420–480 nm:QU 425–465 nm + AL:QU 515 nm:SC 515–532 nm + AL:QU 532 nm(Green):— 900–1100 nm + AL:QU, SC 1064 nm(Fiber):SC, QU 1020–1040 nm(>3 kW High Power):QU 1060–1080 nm(>3 kW High Power):QU 1060–1090 nm + AL:SC 10.6 μm(CO₂):SC AG(Aluminum Substrate Type):— Tuning Modes:VC (Fast Vector)、FV (High-Dynamics Fast Vector) Writing Speed [cps]:— (cps Not Listed; Vector Applications) Processing Speed [rad/s]:QU - Vector:30@30V / 50@48V SC - Vector:40@30V / 65@48V SC-FV:30@30V / 50@48V Positioning Speed [rad/s]:QU - Vector:30@30V / 50@48V SC - Vector:40@30V / 65@48V SC-FV:30@30V / 50@48V Tracking Error [ms]:QU - Vector:0.48 SC - Vector:0.30 SC-FV:0.24 1% Full-Travel Step Response [ms]:QU - Vector:1.2 SC - Vector:0.8 SC-FV:0.65 Field Linear Speed Examples:10.6 m/s(SC,65 rad/s) 12.7 m/s(QU,f=254 mm,50 rad/s) Water Cooling:✓ Straight-Through [W] or 90°[W2],22–28 ℃,<3 bar Water-Cooling Flow / Pressure Drop:2 L/min→0.4 bar;4→0.8;6→1.2 Air Purge (Mirrors):✓ 50–100 L/min,1.0–1.5 bar
Overview
Specifications
| Parameter | Value |
|---|---|
| Supply Voltage | 30 V or 48 V |
| Current | 2 A RMS, maximum 5 A |
| Ripple / Noise [20 MHz] | ≤300 mVpp @20 MHz |
| Interface Signals | Digital:XY2-100 Enhanced + SL2-100 |
| Operating Temperature | +15 ℃ ~ +35 ℃ |
| Humidity [Noncondensing] | ≤80% |
| Protection | IP65 |
| Typical Deflection Angle | ±0.393 rad |
| Resolution [XY2-100-E;16 bit] | 12 μrad |
| Resolution [SL2-100;20 bit] | 0.76 μrad |
| Repeatability [RMS] | <0.4 μrad |
| Positioning Noise [RMS] | <1.0 μrad |
| Temperature Drift — Gain | 8 ppm/K |
| Temperature Drift — Position | 15 μrad/K |
| h Long-Term Drift (Without Water Cooling) [8 h; without water cooling] | <50 μrad |
| h Long-Term Drift (With Water Cooling) [8 h; with water cooling] | <30 μrad |
| Input Aperture | 15 mm |
| Beam Displacement | 18.27 (SC) / 18.33 (QU) |
| Weight (Without Lens) [Without a lens] | ≈3.2 kg |
| External Form L×W×H | 170.0 mm × 125.0 mm × 117.5 mm |
| Tuning Modes | Micromachining Tuning(Sharp Corners, Minimum Tracking Error) |
| Writing Speed | QU:600;SC:800 |
| Processing Speed | QU:30;SC:30 |
| Positioning Speed | QU:30;SC:30 |
| Tracking Error | QU:0.18;SC:0.14 |
| 1% Full-Travel Step Response | QU:0.55;SC:0.45 |
| Examples of Linear Speed across the Working Field [f=163 mm;33 rad/s] | ≈5 m/s(f=163 mm,33 rad/s) |
| Water Cooling | ✓ Straight-Through [W] or90°[W2],22–28 ℃,2–3 bar |
| Water-Cooling Flow Rate / Pressure Drop | 2 L/min→0.3 bar;4→0.4;6→0.7 |
Applications
Key Features
Datasheet
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