SUPERSCAN IV Series High-Dynamic Galvanometer Scanners SS IV-15
SUPERSCAN IV is a high-dynamic, high-speed digital galvanometer scanner using model-based digital regulation and PWM power output to reduce heat. It supports XY2‑100‑E Enhanced and SL2‑100 protocols. The main structure is water-cooled, and IV‑30 supports mirror purging. SOLAR is dedicated to photovoltaics/wafers and requires 48V power. Dynamic response is optimized for MOTF on-the-fly processing, with high configurations supporting laser power up to 6 kW. Model positioning and mirror coating/material and tuning configurations (not technical parameters): Model | SS IV-10 | SS IV-15 | SS IV SOLAR | SS IV-20 | SS IV-30 Product Positioning | High-end industrial applications | High-end industrial applications | High-end industrial applications ( Wafer / Photovoltaics ) | High-end industrial applications | High-end industrial applications 343 nm | — | — | SC(15 and 20 available for both ) | — | — 355 nm( Ultraviolet ) | Si | QU | QU,SC (15) / SC (20) | QU | — 420–480 nm | — | — | — | — | QU 515 nm | — | — | SC( only 15) | — | — 532 nm( Green light ) | Si | QU,Si | QU,SC (15) / — (20) | QU,SC | — 900–1100 nm + AL | — | — | — | — | QU,SC 1020–1040 nm (>3 kW High power ) | — | — | — | — | QU 1030 / 1070 nm | — | SC | SC( only 15) | — | — 1064 nm( Fiber ) | Si | QU,Si,SC | QU,SC (15) / SC (20) | QU,SC | SI,SC,QU 1060–1080 nm | — | QU( High-power coating ) | QU( only 15) | — | QU(>3 kW High power ) 10.6 μm(CO₂) | — | Si,SC | — | Si,SC | Si,SC Optional Tuning | VC( Vector ) M( Micromachining ) | VC、C( Cleaning ) H( Hatching ) | PL( High linearity ) W( Wafer ) | VC( Other options available ) | VC( Fast vector ) FV( High-dynamic fast vector )
Overview
Specifications
| Parameter | Value |
|---|---|
| Supply Voltage | 30 V or 48 V |
| Current | 2 A RMS, maximum 5 A |
| Ripple / Noise [20 MHz] | ≤200 mVpp @20 MHz |
| Interface | Digital XY2-100-E Enhanced + SL2-100 |
| Operating Temperature | +15~+35 ℃ |
| Storage Temperature | −10~+60 ℃ |
| Humidity [Noncondensing] | ≤80% |
| Protection | IP64 |
| Typical Deflection Angle | ±0.393 rad |
| Resolution [XY2-100-E;16 bit] | 12 μrad |
| Resolution [SL2-100;20 bit] | 0.76 μrad |
| Repeatability [RMS] | <2.0 μrad |
| Position Noise [RMS] | <4.5 μrad |
| Temperature Drift — Gain | 15 ppm/K |
| Temperature Drift — Position | 10 μrad/K |
| h Long-Term Drift (without Water Cooling) [8 h; without water cooling] | <60 μrad |
| h Long-Term Drift (with Water Cooling) [8 h; with water cooling] | <40 μrad |
| Input Aperture | 15 mm |
| Beam Displacement | 18.1 (QU/SI) / 18.0 (SC) |
| Weight (Without Lens) [Without a lens] | ≈3.2 kg |
| External Form L×W×H | 170 mm × 125 mm × 117.5 mm |
| Processing / Positioning Speed [@30 V / @48 V] | QU-VC:45/50 QU-C:—/200 SI-VC:50/65 SC-VC:55/75 SC-H:30/30 |
| Tracking Error | QU-VC:0.19 QU-C:0.30 SI-VC:0.16 SC-VC:0.14 SC-H:0.12 |
| 1% Step Response | QU-VC:0.49 QU-C:0.65 SI-VC:0.43 SC-VC:0.37 SC-H:0.47 |
| Examples of Linear Speed across the Working Field | 12.2 m/s(SC,75 rad/s) 12.7 m/s(QU,f=254 mm) |
| Water Cooling | ✓ |
Applications
Key Features
Datasheet
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