MINISCAN III Series Compact Digital Galvanometer Scanners MINISCAN III-20
MINISCAN‑III is a compact digitally controlled galvanometer with digital servo control that further optimizes noise and drift. It supports both XY2‑100 (16bit) and SL2‑100 (20bit). Multiple tunings cover ordinary marking and highly dynamic applications such as metal additive-manufacturing infill and laser cleaning. IP64 suits demanding industrial environments. Model configuration/coating-material correspondence (not technical parameters)： Model | MINISCAN III-10 | MINISCAN III-14 | MINISCAN III-20 Product positioning | Small industrial processing design | Small industrial processing design | Compact industrial design Si / QU Mirror mechanical dimensions | Same | Same | Same Mirror coating | Mirror coating | Mirror coating | Mirror coating 355 nm（Ultraviolet） | Si | Si | — 532 nm（Green） | Si | Si | — 515–540 nm（Green） | — | — | QU 980 + 1940 nm | — | QU | QU 1064 nm（Fiber） | Si | Si | Si 1070 nm | QU | QU | — 900–1100 nm + AL | — | — | Si 1060–1090 nm + AL | — | — | QU 10.6 μm（CO₂） | Si | Si | Si Optional tuning | MA（Marking） | VC（Fast vector） MA（Marking） C（Cleaning / long-vector high speed） | M（Micromachining, sharp corners） MA（Marking） MINISCAN III-20Writing speed：Si-MA：—（MA cps not listed） M Tuningcps not listed
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Overview
Specifications
| Parameter | Value |
|---|---|
| Supply Voltage | +30 V or +48 V |
| Current | 2 A RMS， maximum 5 A |
| Ripple / Noise [20 MHz] | ≤300 mVpp @20 MHz |
| Interface Signals | Digital: XY2-100 enhanced protocol + SL2-100 |
| Operating Temperature | +15~+35 ℃ |
| Storage Temperature | −10~+60 ℃ |
| Humidity [Noncondensing] | ≤80% |
| Protection | IP64 |
| Typical Deflection Angle | ±0.393 rad |
| Resolution [XY2-100；16 bit] | 12 μrad |
| Resolution [SL2-100；20 bit] | 0.76 μrad |
| Repeatability [RMS] | <2.0 μrad |
| Positioning Noise [RMS] | <3.2 μrad |
| Temperature Drift — Gain | 15 ppm/K |
| Temperature Drift — Position | 10 μrad/K |
| Long-Term Drift [8 h] | <80 μrad |
| Input Aperture | 20 mm |
| Beam Displacement | 26.0 mm |
| Weight (Without Lens) [Without a lens] | ≈2.5 kg |
| External Form L×W×H | 145.0 mm × 116.0 mm × 103.5 mm |
| Processing Speed | Si-M：30 Si-MA：30 QU-M：30 |
| Positioning Speed | Si-M：30 Si-MA：55 QU-M：30 |
| Tracking Error | Si-M：0.30 Si-MA：0.34 QU-M：0.34 |
| 1% Full-Travel Step Response | Si-M：0.90 Si-MA：0.80 QU-M：1.01 |
| Examples of Linear Speed across the Working Field (F-Theta f=163 mm) | Si-MA：≈8.9 m/s |
Applications
Key Features
Datasheet
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