Home All Products Imaging AR/VR Wafer-Level Diffractive Optical Waveguide Inspection System Metrondie-SRG

$Wafer-Level Diffractive Optical Waveguide Inspection System Metrondie-SRG$

AR/VR

Wafer-Level Diffractive Optical Waveguide Inspection System Metrondie-SRG

Supplier

Ideaoptics

Part Number

Metrondie-SRG

Overview

Specifications

Parameter	Value
System Functions	Grating diffraction efficiency measurement, grating period metrology, grating morphology measurement, grating orientation measurement
Grating Type	Supports one-dimensional and two-dimensional gratings
Wafer Size	4~12 inch
Measurement Mode -Scatterometry	Incidence -70~70°, reception -70~70°
Measurement Mode -Littrow	-70~70°
Measurement Mode -Reflection	0~70°
Grating Diffraction Efficiency - Spectral Range	200~800nm
Grating Diffraction Efficiency - Measurement Range [@ 532nm]	0.1% @ 532nm
Grating Diffraction Efficiency - Repeatability [@ 532nm]	<±1% @ 532nm
Grating Period - Spectral Range	200~1000nm
Grating Period - Measurement Range	≤±100pm
Grating Period - Repeatability	<±10pm
Grating Morphology - Accuracy	±2% (typ.), ≤±1% (min)
Grating Morphology - Test Time [@ one Die (1point)]	<40s @ one Die (1point)
Grating Orientation - Repeatability	<3'
Sample Stage-Adjustment Dimensions	Four-dimensional (X, Y, Z, θ)
Sample Stage - Adjustment Accuracy	X: ±5μm; Y: ±5μm; Z: ±0.3μm; θ: ±3''
Equipment Dimensions	1700 mm³ × 1000 mm³ × 2300 mm³

Applications

Grating diffraction-efficiency measurement: diffraction efficiency is a core grating-performance indicator, requiring simultaneous angular and wavelength measurement. Grating-period metrology: period is a fundamental diffractive-waveguide parameter affecting proper light propagation and diffraction; traceability is essential, using reference materials that support reproducibility and measurement-value transfer. Grating-morphology measurement: high-performance diffractive waveguides have complex grating morphology. Rapid nondestructive inspection is a core need in batch wafer processing, requiring multidimensional optical-signal acquisition and efficient AI analysis. Grating-orientation measurement: orientation differences between gratings in different waveguide regions are critical to imaging, requiring precise rotation-angle adjustment.

Key Features

Angle-resolved spectroscopy: a wide angular range of -70°~70° and angular accuracy better than 0.02° accurately capture the distribution of multiple diffraction-order intensities versus wavelength and angle. Wafer-level measurement: a highly compatible sample stage covers full inspection of 4~12-inch wafers. Intelligent software accepts wafer layouts for batch mapping of diffractive optical-waveguide wafers. Artificial-intelligence algorithms: online optimization, deep learning and library search closely integrate physical models with multidimensional spectral information, enabling construction and optimization of large model sets and real-time extraction of precise diffractive-waveguide grating morphology parameters. High-precision motorized stage: a four-axis stage provides micrometer-level positioning in X, Y and Z and arcsecond-level angular positioning for in-plane orientation θ, supporting comprehensive automated diffractive-waveguide inspection.

Datasheet

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Supplier Information

Ideaoptics

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Shanghai Ideaoptics Co., Ltd. is a national-level specialized and sophisticated 'Little Giant' enterprise, a deep-spectrum technology innovator. Devoted to the micro-nano optoelectronic field, it develops intelligent full-spectrum technology integrating photonics and AI, building an internationally leading deep-spectrum platform. The company provides comprehensive solutions from technology to products, including micro spectrometers, angle-resolved spectrometers, and confocal Raman spectrometers, widely applied in IC chips, optical chips, biochips, AR/VR, and advanced displays. Through joint R&D centers with universities, Ideaoptics continuously launches breakthrough products, serving over 3,000 customers and cooperating with 170+ semiconductor, advanced materials, and biomedical enterprises, aiming to advance photonic integration and empower semiconductor manufacturing.

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Wafer-Level Diffractive Optical Waveguide Inspection System Metrondie-SRG

Overview

Specifications

Applications

Key Features

Datasheet

Supplier Information

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