Deep-ultraviolet calcium fluoride optic
Introduction to deep-UV-grade calcium fluoride: Deep-UV-grade CaF₂ is a synthetic crystal produced through ultrapure preparation and precision annealing for deep ultraviolet applications, typically <200 nm. It is a core material for advanced optical technology. Production presents very high technical barriers, requiring ultrapure raw-material purification, growth of large defect-free crystals and complex annealing, resulting in extremely high cost.
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Overview
Introduction to deep-UV-grade calcium fluoride: Deep-UV-grade CaF₂ is a synthetic crystal produced through ultrapure preparation and precision annealing for deep ultraviolet applications, typically <200 nm. It is a core material for advanced optical technology. Production presents very high technical barriers, requiring ultrapure raw-material purification, growth of large defect-free crystals and complex annealing, resulting in extremely high cost.
Specifications
| Parameter | Value |
|---|---|
| Dimensions [Selectable specifications (purchase options)] | 5mm; 10mm; 12.5mm; 12.5x12.5mm; 12.7mm; 15mm; 20mm; 25mm; 25x25mm; 25.4mm; 30mm; 40mm; 50mm; 50.8mm; 75mm; 100mm; 125mm; 150mm; 175mm; 200mm; 250mm; >300mm |
| Thickness [Selectable specifications (purchase options)] | 1mm; 1.5mm; 2mm; 3mm; 5mm; 6mm; 10mm; 15mm; 20mm; 25mm |
Applications
Semiconductor lithography: the only available projection-lens material for ArF (193 nm) and KrF (248 nm) systems, directly determining process nodes and yield. Deep-UV lasers: core excimer-laser windows and output couplers.
Key Features
High 190-200 nm deep-UV transmission beyond fused silica; ppb purity eliminates UV color-center darkening; durable under high-power DUV such as ArF 193nm; stress relief/low birefringence and excellent homogeneity ensure wavefront accuracy.
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Supplier Information
Beijing Qifeng Landa Optical Technology Development Co., Ltd., established in early 2005, is a leading technology enterprise dedicated to the development and application of modern optoelectronic technologies.
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