193nm Glan laser polarizer (GLP4015)
193nm Glan laser prism uses EUV crystals with high optical uniformity, providing excellent polarization stability within a narrow band. Precision packaging reduces optical path deviation, suitable for high-precision deep UV laser inspection.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Material | EUV crystal |
| Parallelism | <1 arcmin |
| Surface Quality | 20/10 |
| Beam Deviation | < 3 arcmin |
| Wavefront Distortion [@632.8nm] | λ/4@632.8 nm |
| Damage Threshold | >500 MW/cm² |
| Wavelength Range | 193.368 nm |
| Extinction Ratio | <1x10-4 |
| Field of View | >6.0 ° |
| CA fa | 15.0 mm |
| Outer Diameter | 30.0 mm |
| Length ±0.1 [±0.1(mm)] | 38.6 mm |
Key Features
Datasheet
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Supplier Information
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