193nm Glan-Taylor polarizer (GTP4025)
The 193nm Glan-Taylor polarizer uses α-BBO birefringent crystals separated by an air gap, eliminating the absorption problem of adhesive materials in the deep ultraviolet band. A single-layer MgF₂ anti-reflection coating ensures high transmittance at 193nm while maintaining excellent extinction performance. This device has a high laser damage threshold and is an ideal choice for high-precision polarization control in applications such as ArF excimer laser lithography and deep ultraviolet laser processing.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Material | Deep UV material |
| Parallelism | <1 arcmin |
| Surface Quality | 20/10 |
| Beam Deviation | < 3 arcmin |
| Wavefront Distortion [@632.8nm] | 1/4@632.8 nm |
| Damage Threshold | >200 MW/cm² |
| Wavelength Range | 193.368 nm |
| Extinction Ratio | <1x10-4 |
| Field of View | >6.0 ° |
| CA fa | 22.0 mm |
| Outer Diameter | 50.8 mm |
| Length ±0.1 [±0.1(mm)] | 33.0 mm |
Key Features
Datasheet
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Supplier Information
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