interferoMETER

interferoMETER

Supplier
Micro-Epsilon
Part Number
interferoMETER
Category
Interferometers
Origin
China

The interferoMETER series offers ultra-precise white light interferometers for distance and thickness measurement, setting new standards in precision measurement technology.

Specification Snapshot
Resolution
<1nm
Power Consumption
10W
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Overview

The interferoMETER series offers ultra-precise white light interferometers for distance and thickness measurement, setting new standards in precision measurement technology.

Specifications

ParameterValue
Resolution<1nm
Measurement Frequency100Hz-6kHz
Linearity±50nm
Temperature Stability<10ppm
Light SourceNIR-SLED, approx. 840nm
Supply Voltage24VDC±15%
Power Consumption10W
Digital InterfaceEtherCAT/RS422/PROFINET/EtherNet/IP
Analog Output4-20mA/0-10V
Protection LevelIP40
Operating Temperature Range+15°C to +35°C
Storage Temperature Range-20°C to +70°C
MaterialAluminum housing

Applications

1. Semiconductor wafer thickness measurement 2. Glass layer thickness measurement 3. Metal coating thickness measurement 4. Positioning in precision manufacturing

Key Features

1. Ultra-high precision measurement 2. Compact and robust design 3. Wide application range 4. Easy integration into industrial systems

Datasheet

Product Datasheet
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Supplier Information

Mi
Micro-Epsilon
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<p>As a leading manufacturer of precision sensor technology, we are shaping the future. Our systems are used whenever accuracy and performance are crucial to success. In machine building and automation as well as in satellite technology and in the production of next-generation batteries and computer chips. As a globally active group of companies, we are making a decisive contribution to the world of tomorrow - and have been doing so for more than 56 years.</p>

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interferoMETER
Micro-Epsilon · Interferometers
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