Transpector XPR 3+
The Transpector XPR 3+ is a high-performance gas analyzer designed for semiconductor and display manufacturing. It provides real-time monitoring and control for PVD and sputtering processes, ensuring superior product protection and maximizing yield.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Mass Range | 1–100amu |
| Resolution (per 1993 AVS recommended practice) | <1@10%measuredatmass4,20,28and40 |
| Mass Filter Type | Quadrupole |
| Detector Type | Off-axisFCandmicrochannelplateEM |
| Mass Position Stability | <0.1amuover24hours |
| Peak Ratio Stability | <2%over24hours |
| Sensitivity (nominal) | ≥4E-7amps/Torr(3E-7amps/mbar) |
| Minimum Detectable Partial Pressure | ≤1E-9Torr(1.3E-9mbar) |
| Maximum Operating Pressure | 20mTorr(2.6E-2mbar) |
| Maximum Sensor Operating Temperature | 150°C |
| Maximum Bakeout Temperature (Electronics Removed) | 200°C |
| PPM Detectable Limit (at 1–5mTorr process pressure) | 10ppm |
| Ambient Operating Temperature | 5–50°C |
| Power Input | 20–30V(dc),30Wmax |
| Ethernet Communications Interface | Standard:CAT5eEthernetcableconnection |
| Standard I/O | Oneanaloginput,twodigitalinputs,onerelay,24V@0.5A |
| Extended I/O (optional) | Fouranaloginputs,fouranalogoutputs,fourrelays,24V@0.5A,12digitalinputsoroutputs |
| Dimensions | 292.1mmx121.7mmx115.0mm |
Applications
Key Features
Datasheet
Supplier Information
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