Transpector MPS and MPH
Transpector MPS and MPH are high-performance residual gas analyzers designed for general vacuum applications, offering industry-leading data collection speed, minimum detectable partial pressure, and signal-to-noise ratio.
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Overview
Transpector MPS and MPH are high-performance residual gas analyzers designed for general vacuum applications, offering industry-leading data collection speed, minimum detectable partial pressure, and signal-to-noise ratio.
Specifications
| Parameter | Value |
|---|---|
| Sensor Length (vacuum side) MPS100F | 14.3cm(5.63in) |
| Sensor Length (vacuum side) MPS100M | 19.3cm(7.83in) |
| Sensor Length (vacuum side) MPS200F | 14.3cm(5.63in) |
| Sensor Length (vacuum side) MPS200M | 19.3cm(7.83in) |
| Sensor Length (vacuum side) MPH100F | 14.3cm(5.63in) |
| Sensor Length (vacuum side) MPH100M | 19.3cm(7.83in) |
| Sensor Length (vacuum side) MPH200F | 14.3cm(5.63in) |
| Sensor Length (vacuum side) MPH200M | 19.3cm(7.83in) |
| Sensor Length (vacuum side) MPH300F | 14.3cm(5.63in) |
| Sensor Length (vacuum side) MPH300M | 19.3cm(7.83in) |
| Mass Range MPS100F | 1to100amu |
| Mass Range MPS200F | 1to200amu |
| Mass Range MPH100F | 1to100amu |
| Mass Range MPH200F | 1to200amu |
| Mass Range MPH300F | 1to300amu |
| Detector Type MPS100F | FC |
| Detector Type MPS100M | EM/FC |
| Detector Type MPS200F | FC |
| Detector Type MPS200M | EM/FC |
| Detector Type MPH100F | FC |
| Detector Type MPH100M | EM/FC |
| Detector Type MPH200F | FC |
| Detector Type MPH200M | EM/FC |
| Detector Type MPH300F | FC |
| Detector Type MPH300M | EM/FC |
| Filament Type MPS100F | DualY2O3/Irfilaments |
| Filament Type MPH100F | Tungsten(forhalogenenvironmentapplications) |
| Resolution | <1nmwide±10%peakheightovertheentiremassrange |
| Temperature Coefficient | <1%ofpeakheightperdegreeC(forFCOnly) |
| Sensitivity(amps/mbar) FC | 3×10-6(2.3×10-6) |
| Sensitivity(amps/mbar) EM | 6×10-6(4.5×10-6) |
| Min.DetectablePressure(amps/mbar) FC | 2.6×10-7(3.5×10-7) |
| Min.DetectablePressure(amps/mbar) EM | 1.5×10-8(2×10-8) |
| Max.DataRate | 3msperpoint |
| ZeroBlastInterferenceatMass2 | <100ppm |
| TotalPressureMeasurementRange | 2×10-7–5×10-2(2.7×10-7–6.7×10-9)Torr(mbar) |
| Max.OperatingPressure | 5×10-6(6.7×10-9)Torr(mbar) |
| Max.BakeoutTemperature(electronicsremoved) | 300°C |
| Max.SensorOperatingTemperature FC | 200°C |
| Max.SensorOperatingTemperature EM | 150°C |
| PowerInput | 20-30V(dc),30Wmax–typical24V(dc)1.25Amax |
| EthernetCommunicationsInterface | Standard:CAT5eEthernetcableconnection |
| OptionalCalibrationReference | ArgonforEMcalibrationortestmixfortuning |
| RelayOutputs | Onerelay,24Vat0.5amps |
| Inputs | Oneanaloginput |
| Inputs | twodigitalinputs |
| LEDIndicators(green) | Oneforpowerstatus |
| LEDIndicators(green) | oneforemissionstatus |
Applications
1. Vacuum furnace applications 2. Heat treating processes 3. Vacuum coating processes
Key Features
1. Ultrafast data collection 2. Calibration reference 3. TCP/IP Ethernet connectivity 4. Dual filaments 5. Field replaceable electron multiplier 6. Combined anode, cathode, and repeller filament kit 7. Interchangeable sensors and electronics 8. RoHS compliant
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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