Transpector MPS and MPH

Transpector MPS and MPH

Supplier
Inficon
Part Number
Transpector MPS and MPH
Category
Gas Analysis
Origin
China

Transpector MPS and MPH are high-performance residual gas analyzers designed for general vacuum applications, offering industry-leading data collection speed, minimum detectable partial pressure, and signal-to-noise ratio.

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Overview

Transpector MPS and MPH are high-performance residual gas analyzers designed for general vacuum applications, offering industry-leading data collection speed, minimum detectable partial pressure, and signal-to-noise ratio.

Specifications

ParameterValue
Sensor Length (vacuum side) MPS100F14.3cm(5.63in)
Sensor Length (vacuum side) MPS100M19.3cm(7.83in)
Sensor Length (vacuum side) MPS200F14.3cm(5.63in)
Sensor Length (vacuum side) MPS200M19.3cm(7.83in)
Sensor Length (vacuum side) MPH100F14.3cm(5.63in)
Sensor Length (vacuum side) MPH100M19.3cm(7.83in)
Sensor Length (vacuum side) MPH200F14.3cm(5.63in)
Sensor Length (vacuum side) MPH200M19.3cm(7.83in)
Sensor Length (vacuum side) MPH300F14.3cm(5.63in)
Sensor Length (vacuum side) MPH300M19.3cm(7.83in)
Mass Range MPS100F1to100amu
Mass Range MPS200F1to200amu
Mass Range MPH100F1to100amu
Mass Range MPH200F1to200amu
Mass Range MPH300F1to300amu
Detector Type MPS100FFC
Detector Type MPS100MEM/FC
Detector Type MPS200FFC
Detector Type MPS200MEM/FC
Detector Type MPH100FFC
Detector Type MPH100MEM/FC
Detector Type MPH200FFC
Detector Type MPH200MEM/FC
Detector Type MPH300FFC
Detector Type MPH300MEM/FC
Filament Type MPS100FDualY2O3/Irfilaments
Filament Type MPH100FTungsten(forhalogenenvironmentapplications)
Resolution<1nmwide±10%peakheightovertheentiremassrange
Temperature Coefficient<1%ofpeakheightperdegreeC(forFCOnly)
Sensitivity(amps/mbar) FC3×10-6(2.3×10-6)
Sensitivity(amps/mbar) EM6×10-6(4.5×10-6)
Min.DetectablePressure(amps/mbar) FC2.6×10-7(3.5×10-7)
Min.DetectablePressure(amps/mbar) EM1.5×10-8(2×10-8)
Max.DataRate3msperpoint
ZeroBlastInterferenceatMass2<100ppm
TotalPressureMeasurementRange2×10-7–5×10-2(2.7×10-7–6.7×10-9)Torr(mbar)
Max.OperatingPressure5×10-6(6.7×10-9)Torr(mbar)
Max.BakeoutTemperature(electronicsremoved)300°C
Max.SensorOperatingTemperature FC200°C
Max.SensorOperatingTemperature EM150°C
PowerInput20-30V(dc),30Wmax–typical24V(dc)1.25Amax
EthernetCommunicationsInterfaceStandard:CAT5eEthernetcableconnection
OptionalCalibrationReferenceArgonforEMcalibrationortestmixfortuning
RelayOutputsOnerelay,24Vat0.5amps
InputsOneanaloginput
Inputstwodigitalinputs
LEDIndicators(green)Oneforpowerstatus
LEDIndicators(green)oneforemissionstatus

Applications

1. Vacuum furnace applications 2. Heat treating processes 3. Vacuum coating processes

Key Features

1. Ultrafast data collection 2. Calibration reference 3. TCP/IP Ethernet connectivity 4. Dual filaments 5. Field replaceable electron multiplier 6. Combined anode, cathode, and repeller filament kit 7. Interchangeable sensors and electronics 8. RoHS compliant

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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