Quantus HP100 Gas Analyzer
Quantus HP100 is a reliable gas analyzer designed for real-time leak detection, endpoint detection, and process monitoring in corrosive and non-corrosive environments. It utilizes Self-Plasma Optical Emission Spectroscopy (SPOES) technology to ensure high sensitivity and compatibility with semiconductor processes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Technology | Optical Emission Spectroscopy with integrated microwave microplasma |
| Technology | spectrometer |
| Technology | and RF power supply |
| Spectrometer Performance | 200–850nm wavelengths (UV-VIS) 16-bit full-scale resolution, 3648 pixels |
| Optical Resolution | 1.34nm |
| Exposure Time | Minimum of 1ms |
| Sampling Frequency | Maximum of 20Hz |
| Detection Limit | <1ppm levels (application dependent) |
| Sampling Environment | 1–450Torr for argon and 1–120Torr for nitrogen; operating range varies for other gas species |
| Vacuum Fitting | KF25 |
| Serviceability | Sensor cell is field replaceable |
| Communication Type | Ethernet cable connection |
| Operating Temp Range | 0 to 50°C (non-condensing, sensor cell 80°C) |
| Power Requirements | 24Vdc (±2.5) AC/DC converter available |
| Isolation Valve | Optional |
| Dimensions | 162mmH x 153mmW x 210mmL (6.4in x 6.0in x 8.3in) |
| Weight | 3.7kg (8.2lb) |
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Key Features
Datasheet
Supplier Information
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