Quantus LP100+ Gas Analyzer
The Quantus LP100+ Gas Analyzer provides real-time leak and endpoint detection for critical process environments, designed to instantly react to small changes in sensitive process environments to minimize scrap and improve yields.
Specification Snapshot
Technology
Optical Emission Spectroscopy using proprietary and integrated ICP microplasma
Technology
spectrometer
Technology
and RF power supply
Dimensions (HxWxL)
87x150x241mm (3.4x5.9x9.5in.)
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Overview
The Quantus LP100+ Gas Analyzer provides real-time leak and endpoint detection for critical process environments, designed to instantly react to small changes in sensitive process environments to minimize scrap and improve yields.
Specifications
| Parameter | Value |
|---|---|
| Technology | Optical Emission Spectroscopy using proprietary and integrated ICP microplasma |
| Technology | spectrometer |
| Technology | and RF power supply |
| Spectrometer Performance | 200–850nm wavelengths (UV-VIS) 16-bit full-scale resolution, 3648 pixels |
| Exposure Time | Minimum of 1ms |
| Sampling Frequency | Maximum of 10Hz |
| Detection Limit | To low ppm levels (application dependent) |
| Operating Pressure | 10mTorr to 1Torr (application dependent) |
| Vacuum Fitting | KF25 |
| Maximum Flange Temperature | 80°C |
| Serviceability | Sensor cell is field replaceable |
| Operating Temperature Range | 0–50°C (non-condensing, sensor cell 80°C) |
| Power Requirements | 24V (DC) @ 2.5A (AC/DC converter available) |
| Isolation Valve | Optional |
| Dimensions (HxWxL) | 87x150x241mm (3.4x5.9x9.5in.) |
| Weight | 2.7kg (5.9lb.) |
Applications
1. Real-time leak detection in critical process environments 2. Endpoint detection for sensitive processes
Key Features
1. Convenient field-replaceable plasma cell 2. Easy installation using a standard KF25 connection 3. Low maintenance 4. Excellent detection limits down to low ppm levels 5. Operating range of 10mTorr to 1Torr 6. Long-term reliability: no pumps required 7. Low cost of ownership 8. Fast sampling (10Hz maximum) 9. Small footprint (87x150x241mm) 10. Supported by experienced field-trained INFICON engineers
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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