Quantus LP100+ Gas Analyzer

Quantus LP100+ Gas Analyzer

Supplier
Inficon
Part Number
Quantus LP100+ Gas Analyzer
Category
Gas Analysis
Origin
China

The Quantus LP100+ Gas Analyzer provides real-time leak and endpoint detection for critical process environments, designed to instantly react to small changes in sensitive process environments to minimize scrap and improve yields.

Specification Snapshot
Technology
Optical Emission Spectroscopy using proprietary and integrated ICP microplasma
Technology
spectrometer
Technology
and RF power supply
Dimensions (HxWxL)
87x150x241mm (3.4x5.9x9.5in.)
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Overview

The Quantus LP100+ Gas Analyzer provides real-time leak and endpoint detection for critical process environments, designed to instantly react to small changes in sensitive process environments to minimize scrap and improve yields.

Specifications

ParameterValue
TechnologyOptical Emission Spectroscopy using proprietary and integrated ICP microplasma
Technologyspectrometer
Technologyand RF power supply
Spectrometer Performance200–850nm wavelengths (UV-VIS) 16-bit full-scale resolution, 3648 pixels
Exposure TimeMinimum of 1ms
Sampling FrequencyMaximum of 10Hz
Detection LimitTo low ppm levels (application dependent)
Operating Pressure10mTorr to 1Torr (application dependent)
Vacuum FittingKF25
Maximum Flange Temperature80°C
ServiceabilitySensor cell is field replaceable
Operating Temperature Range0–50°C (non-condensing, sensor cell 80°C)
Power Requirements24V (DC) @ 2.5A (AC/DC converter available)
Isolation ValveOptional
Dimensions (HxWxL)87x150x241mm (3.4x5.9x9.5in.)
Weight2.7kg (5.9lb.)

Applications

1. Real-time leak detection in critical process environments 2. Endpoint detection for sensitive processes

Key Features

1. Convenient field-replaceable plasma cell 2. Easy installation using a standard KF25 connection 3. Low maintenance 4. Excellent detection limits down to low ppm levels 5. Operating range of 10mTorr to 1Torr 6. Long-term reliability: no pumps required 7. Low cost of ownership 8. Fast sampling (10Hz maximum) 9. Small footprint (87x150x241mm) 10. Supported by experienced field-trained INFICON engineers

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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Inficon · Gas Analysis
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