Augent™ OPG550 Optical Plasma Vacuum Gauge
The INFICON Augent™ OPG550 Optical Plasma Vacuum Gauge is a compact and intelligent solution for vacuum monitoring. It combines two sensor technologies into one device for gas type monitoring and total pressure measurement, offering high precision and reliability.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Measurement System | Cold Cathode according inverted magnetron principle and Thermal conductivity according Pirani principle |
| Measurement Range N2 (mbar) | 1×10⁻⁷...5 |
| Measurement Range N2 (Torr) | (7.6×10⁻⁸...3.8) |
| Detection limit 25 liter chamber O2 leaks in pressure rise method (mTorr/min) | >=0.3 |
| O2 leaks during pump down from atmosphere with N2 backfill (mTorr/min) | >=1 |
| Accuracy total pressure reading N2 1×10⁻⁷...100mbar (% of reading) | 30 |
| Accuracy total pressure reading N2 100...1000mbar (% of reading) | 50 |
| Repeatability total pressure reading N2 1×10⁻⁷...100mbar (% of reading) | 5 |
| Pressure limited to inert gases <50°C (bar absolute) | <=10 |
| Temperature Operation (ambient) (°C) | +5...+50 |
| Temperature Storage (°C) | -20...+70 |
| Bakeout at flange with electronic unit (°C) | <=80 |
| Bakeout at flange w/o electronic unit (°C) | <=120 |
| Relative humidity for 30 days a year (%) | <=95 (non-condensing) |
| Supply voltage at gauge (Vdc) | +14.5...+30 |
| Supply voltage ripple (V p-p) | <=1 |
| Supply voltage power consumption (W) | <=5 |
| Supply voltage fuse to be connected (AT) | 1 |
| Digital Output Signal | RS232C |
| Electrical Connection | D-Sub, 9-pin, male |
| High voltage (in the measuring chamber) Ignition voltage (kV) | <=4.5 |
| High voltage (in the measuring chamber) Operating voltage (kV) | <=3.3 |
| Materials exposed to vacuum General | Al2O3, Stainless steel 1.4435 |
| Materials exposed to vacuum Anode | Molybdenum |
| Materials exposed to vacuum Ionization chamber | Titanium, stainless steel 1.4016 |
| Materials exposed to vacuum Ignition aid | Stainless steel 1.4310 |
| Vacuum flange 1/2 in. tube (spiral baffle) | DN16 ISO-KF, DN16 CF-R, 8-VCR female |
| Vacuum flange 1 in. tube (standard baffle) | DN25 ISO-KF, DN40 ISO-KF, DN40 CF-F |
| Internal volume (cm³) | <=46 (2.81) |
| Weight (g) | <=700 |
| Dimensions Footprint (mm) | 68×68 |
| Dimensions Height (mm) | <=154 |
| Protection type | IP40 |
| Standards | CE |
Applications
Key Features
Datasheet
Supplier Information
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