Easy Rate Dual Sensor
The Easy Rate Dual Sensor minimizes quartz crystal microbalance (QCM) total cost of ownership through low price and extended sensor life. It is designed for high-accuracy thickness monitoring in short optical and batch coating processes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Bakeout Temperature (No Water) | 175°C |
| Maximum Operating Isothermal Environment Temperature (Minimum Water Flow) | 400°C |
| Size | 3.25×9.00×3.15cm (1.28×3.55×1.24in) |
| Water Tube | 4.76mm (0.188in) OD seamless stainless steel |
| Crystal exchange | Front loading; shutter can easily be removed for access to the holders |
| Mounting | Two #4-40 tapped holes on the back of the sensor body |
| Feedthrough | Two pass water 6.35mm (0.250in) OD with two microdot coaxial connections; One pass air 4.76mm (0.188in) OD |
| Other | XIUs or oscillators to match specific controller |
| Other | solenoid valve assembly for shutter |
| Water Flow | Minimum water flow 150-200cm³/min, 30°C max |
| Water quality | Coolant should not contain chlorides as stress corrosion cracking may occur; Extremely dirty water may result in loss of cooling capacity |
| Crystal Diameter | 13.97mm (0.550in) |
| Material (Body and Holder) | 304 type stainless steel |
| Springs, Electrical Contacts | Gold plated beryllium copper |
| Water Tube Material | S-304, 4.76mm (0.188in) OD×0.51mm (0.020in) wall thickness seamless stainless steel tubing |
| Air Tube Material | S-304, 3.175mm (0.125in) OD×0.381mm (0.015in) wall thickness seamless stainless steel tubing |
| Connector (Microdot) | Stainless steel |
| Connector (Microdot) | Teflon |
| Connector (Microdot) | and glass insulation |
| Insulators | >99% aluminum oxide, Teflon |
| Wire | Tin plated copper |
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