RSH-600 Sensor
The RSH-600 Sensor is designed to maximize PVD accuracy and production with six crystals per sensor and a long-lasting sensor design. It ensures high-quality film deposition and reliable thickness monitoring in high-temperature environments up to 300°C.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Number of Crystals | Six |
| Crystal Size | 14mm (0.550in) diameter |
| Installation Aperture | 50.8mm (2.0in) diameter |
| Overall Length | 200mm (7.9in), 350mm (13.8in), 450mm (17.7in), 540mm (21.3in), 650mm (25.6in) |
| Power Requirement | 24V (dc) solenoid valve: 21.6–26.4V (dc), 40mA; 115V (ac) solenoid valve: 90–132V (ac), 36/32mA rms (50/60Hz) |
| Crystal Switching Method | Air Actuated @ 55psig (4kg/cm²) regulated |
| Cooling Method | Water-cooled @ 5L/min at 2kg/cm² (28psi) (Do not allow to freeze) |
| Air and Water Connections | One 1/4in quick connect for air, two 1/4in compression fittings for water |
| Maximum Bakeout Temperature Without Water | 130°C |
| Operating Temperature | 300°C max with water cooling and stainless steel head cover; 400°C max with water cooling and copper head cover |
| Weight | 3.8kg (8.5lb), varies with overall length |
| Materials | 304 stainless steel, Teflon®, beryllium nickel |
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