Type A Sensor for Quartz Crystal Deposition Controllers
The Type A Sensor is a motorized crystal sensor designed for quartz crystal deposition controllers, offering precise and reliable rate and thickness control for thin film deposition processes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum bakeout temperature without coolant | 50°C (at motor surface) |
| Maximum operating isothermal environment temperature at minimum flow conditions | 190°C (at carousel cover surface) |
| Product dimensions | See drawings below |
| Power supply voltage for motor operation | 24V DC (including stepping motor driver for carousel and chopper) |
| Water and air piping length | 2000mm standard |
| Coaxial cable length | 1700mm standard |
| Crystal exchange | Front mount |
| Mechanical parts, shields, choppers, bodies, carousels | SS304 |
| Springs, electronic contacts, bearing covers | Gold-plated beryllium copper (Au-plated BeCu), gold-plated oxygen-free copper (Au-plated OFHC) |
| Connectors | SS304 |
| Insulators | PEEK |
| Chopper couplings | Vespel |
| Magnetic fluid seals | SS304, SS430 |
| Crystal | 14mm (0.550 in.) |
| Water, air piping | Teflon |
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