PPX-50 Piezoelectric Motor Stage
PPX-50 is a high-precision piezoelectric motor stage designed for applications requiring ultra-fine positioning and stability.
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Overview
PPX-50 is a high-precision piezoelectric motor stage designed for applications requiring ultra-fine positioning and stability.
Specifications
| Parameter | Value |
|---|---|
| Travel Range(mm) | 28x28 |
| Straightness/Flatness(μm) | ±3.5 |
| Pitch(μrad) | ±200 |
| Yaw(μrad) | ±100 |
| Weight (Open Loop)(g) | 110 |
| Weight (Closed Loop)(g) | 115 |
| Motor | Piezoelectric Motor |
| Max Speed(mm/s) | 2(MMC-100), 10(MMC-110) |
| Grating Scale | None (Open Loop), Analog (1Vpp), Digital (RS-422) |
| Repeatability, Bidirectional(nm) | 1, 10 |
| Repeatability, Unidirectional(nm) | n/a, ±50 |
| Resolution, Unidirectional(nm) | 50 |
| Material | Aluminum body, steel guide rail (optional stainless steel or other materials) |
| 最大负载Fx[N] | 2 |
| 最大负载Fy[N] | 2 |
| 最大负载Fz[N] | 30 |
| 最大负载Mx[N·m] | 0.6 |
| 最大负载My[N·m] | 0.6 |
| 最大负载Mz[N·m] | 0.6 |
| 最大负载kαx[μrad/N·m] | - |
| 最大负载kαy[μrad/N·m] | - |
Applications
1. Precision optical alignment 2. Semiconductor manufacturing 3. Scientific research 4. Microscopy
Key Features
1. High precision positioning 2. Compact design 3. Suitable for vacuum environments 4. Multiple encoder options
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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