PPS-20 Precision Stage
The PPS-20 is a high-precision piezoelectric stage designed for applications requiring ultra-fine positioning and stability.
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Overview
The PPS-20 is a high-precision piezoelectric stage designed for applications requiring ultra-fine positioning and stability.
Specifications
| Parameter | Value |
|---|---|
| Travel (mm) PPS-20-12 | 12mm |
| Travel (mm) PPS-20-18 | 18mm |
| Travel (mm) PPS-20-26 | 26mm |
| Travel (mm) PPS-20-51 | 51mm |
| Straightness/Flatness (μm) PPS-20-12 | ±1μm |
| Straightness/Flatness (μm) PPS-20-18 | ±1.5μm |
| Straightness/Flatness (μm) PPS-20-26 | ±1.5μm |
| Straightness/Flatness (μm) PPS-20-51 | ±2.5μm |
| Yaw (μrad) PPS-20-12 | ±70 |
| Yaw (μrad) PPS-20-18 | ±90 |
| Yaw (μrad) PPS-20-26 | ±90 |
| Yaw (μrad) PPS-20-51 | ±100 |
| Weight (Open Loop) (g) PPS-20-12 | 22g |
| Weight (Open Loop) (g) PPS-20-18 | 28g |
| Weight (Open Loop) (g) PPS-20-26 | 36g |
| Weight (Open Loop) (g) PPS-20-51 | 70g |
| Weight (Closed Loop) (g) PPS-20-12 | 25g |
| Weight (Closed Loop) (g) PPS-20-18 | 35g |
| Weight (Closed Loop) (g) PPS-20-26 | 42g |
| Weight (Closed Loop) (g) PPS-20-51 | 78g |
| Maximum Speed (mm/s) PPS-20-12 | 2(MMC-100), 10(MMC-110)mm/s |
| Maximum Speed (mm/s) PPS-20-18 | 2(MMC-100), 10(MMC-110)mm/s |
| Maximum Speed (mm/s) PPS-20-26 | 2(MMC-100), 10(MMC-110)mm/s |
| Maximum Speed (mm/s) PPS-20-51 | 2(MMC-100), 10(MMC-110)mm/s |
| Encoder | None (Open Loop), Analog (1Vpp), Digital (RS-422) |
| Resolution (nm) PPS-20-12 | 1nm |
| Resolution (nm) PPS-20-18 | 10nm |
| Resolution (nm) PPS-20-26 | 10nm |
| Resolution (nm) PPS-20-51 | 2nm |
| Repeatability (Bidirectional) (nm) PPS-20-12 | n/a |
| Repeatability (Bidirectional) (nm) PPS-20-18 | ±50nm |
| Repeatability (Bidirectional) (nm) PPS-20-26 | ±50nm |
| Repeatability (Bidirectional) (nm) PPS-20-51 | ±50nm |
| Repeatability (Unidirectional) (nm) PPS-20-12 | n/a |
| Repeatability (Unidirectional) (nm) PPS-20-18 | 50nm |
| Repeatability (Unidirectional) (nm) PPS-20-26 | 50nm |
| Repeatability (Unidirectional) (nm) PPS-20-51 | 50nm |
| Maximum load Fx (N) | 2N |
| Maximum load Fy (N) | 20N |
| Maximum load Fz (N) | 20N |
| Maximum Load Mx (N·m) | 0.7N·m |
| Maximum Load My (N·m) | 0.7N·m |
| Maximum Load Mz (N·m) | 0.7N·m |
Applications
1. High-precision optical alignment 2. Semiconductor manufacturing 3. Scientific research and testing 4. Microscopy and imaging
Key Features
1. Compact design for space-saving integration 2. High precision and stability 3. Multiple travel ranges available 4. Suitable for various environments including vacuum and cryogenic conditions
Datasheet
Product Datasheet
PDF
Supplier Information
SYMC (Tianjin) Instrument Equipment Co., Ltd. is a professional manufacturer focusing on ultra-precision motion control technology and products. We are committed to providing innovative products and solutions for ultra-precision motion control technology for the manufacturing of high-end equipment and the research and development of scientific research instruments. Adhering to the purpose of "high-end innovation, lean manufacturing" and the goal of "building an international brand of China's high-end manufacturing", we provide key technologies and build a solid foundation for the upgrading of China's high-end manufacturing equipment industry, and realize the localization of core technology equipment.
SYMC (Tianjin) Instrument Equipment Co., Ltd. has reached the international advanced level in nano motion control technology and owns complete independent intellectual property rights. The company's core technology integrates precision sensing, precision driving, precision machinery, precision control, precision measurement and precision integration, and the comprehensive indicators of products have reached the international advanced level. The company provides a series of products and complete solutions including high-precision nano positioning platforms, high-speed tip-tilt mirrors, piezoelectric actuators, nano capacitive displacement sensors, high-precision air bearing platforms, piezoelectric driven positioning platforms, micro positioning platforms, microscope stages and precision motion control integration.
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