PPS-20 Precision Stage
The PPS-20 is a high-precision piezoelectric stage designed for applications requiring ultra-fine positioning and stability.
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Overview
The PPS-20 is a high-precision piezoelectric stage designed for applications requiring ultra-fine positioning and stability.
Specifications
| Parameter | Value |
|---|---|
| Travel (mm) PPS-20-12 | 12mm |
| Travel (mm) PPS-20-18 | 18mm |
| Travel (mm) PPS-20-26 | 26mm |
| Travel (mm) PPS-20-51 | 51mm |
| Straightness/Flatness (μm) PPS-20-12 | ±1μm |
| Straightness/Flatness (μm) PPS-20-18 | ±1.5μm |
| Straightness/Flatness (μm) PPS-20-26 | ±1.5μm |
| Straightness/Flatness (μm) PPS-20-51 | ±2.5μm |
| Yaw (μrad) PPS-20-12 | ±70 |
| Yaw (μrad) PPS-20-18 | ±90 |
| Yaw (μrad) PPS-20-26 | ±90 |
| Yaw (μrad) PPS-20-51 | ±100 |
| Weight (Open Loop) (g) PPS-20-12 | 22g |
| Weight (Open Loop) (g) PPS-20-18 | 28g |
| Weight (Open Loop) (g) PPS-20-26 | 36g |
| Weight (Open Loop) (g) PPS-20-51 | 70g |
| Weight (Closed Loop) (g) PPS-20-12 | 25g |
| Weight (Closed Loop) (g) PPS-20-18 | 35g |
| Weight (Closed Loop) (g) PPS-20-26 | 42g |
| Weight (Closed Loop) (g) PPS-20-51 | 78g |
| Maximum Speed (mm/s) PPS-20-12 | 2(MMC-100), 10(MMC-110)mm/s |
| Maximum Speed (mm/s) PPS-20-18 | 2(MMC-100), 10(MMC-110)mm/s |
| Maximum Speed (mm/s) PPS-20-26 | 2(MMC-100), 10(MMC-110)mm/s |
| Maximum Speed (mm/s) PPS-20-51 | 2(MMC-100), 10(MMC-110)mm/s |
| Encoder | None (Open Loop), Analog (1Vpp), Digital (RS-422) |
| Resolution (nm) PPS-20-12 | 1nm |
| Resolution (nm) PPS-20-18 | 10nm |
| Resolution (nm) PPS-20-26 | 10nm |
| Resolution (nm) PPS-20-51 | 2nm |
| Repeatability (Bidirectional) (nm) PPS-20-12 | n/a |
| Repeatability (Bidirectional) (nm) PPS-20-18 | ±50nm |
| Repeatability (Bidirectional) (nm) PPS-20-26 | ±50nm |
| Repeatability (Bidirectional) (nm) PPS-20-51 | ±50nm |
| Repeatability (Unidirectional) (nm) PPS-20-12 | n/a |
| Repeatability (Unidirectional) (nm) PPS-20-18 | 50nm |
| Repeatability (Unidirectional) (nm) PPS-20-26 | 50nm |
| Repeatability (Unidirectional) (nm) PPS-20-51 | 50nm |
| Maximum load Fx (N) | 2N |
| Maximum load Fy (N) | 20N |
| Maximum load Fz (N) | 20N |
| Maximum Load Mx (N·m) | 0.7N·m |
| Maximum Load My (N·m) | 0.7N·m |
| Maximum Load Mz (N·m) | 0.7N·m |
Applications
1. High-precision optical alignment 2. Semiconductor manufacturing 3. Scientific research and testing 4. Microscopy and imaging
Key Features
1. Compact design for space-saving integration 2. High precision and stability 3. Multiple travel ranges available 4. Suitable for various environments including vacuum and cryogenic conditions
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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