VZT-I Vertical Lift Stage VZT-I-30
VZT Vertical Translation Stages Provide Micrometer-Accuracy Vertical Motion for Light- or Heavy-Load Applications. Their Precise, Fast Positioning Suits Semiconductor Manufacturing, Laser Processing and Biomedical Industries.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 30 mm |
| Accuracy | ±1 µm |
| Repeatability (Bi-Directional) | ±0.2 µm |
| Resolution (Minimum Incremental Motion) | 0.1 um |
| Straightness & Flatness | ±2 µm |
| Pitch | 20 arc sec |
| Yaw | 20 arc sec |
| Maximum Speed [source isolated 2 at speed/acceleration boundary；exponent ownership not assigned] | 10mm/s |
| Maximum Acceleration [No Load；source isolated 2 at speed/acceleration boundary；exponent ownership not assigned] | 5m/s |
| In-Position Stability | <2 nm |
| Maximum Force (Continuous) | 80 N |
| Center Load Capacity | 4 kg |
| Stage Mass | 3.3 kg |
| Material | Black Aluminum Body |
| MTBF (Mean Time Between Failure) | 20,000 |
Key Features
Datasheet
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