VZT-I Vertical Lift Stage VZT-I-20

VZT-I Vertical Lift Stage VZT-I-20

Supplier
Nano-stage
Part Number
VZT-I-20
Category
Motorized Stages
Origin
China

VZT Vertical Translation Stages Provide Micrometer-Accuracy Vertical Motion for Light- or Heavy-Load Applications. Their Precise, Fast Positioning Suits Semiconductor Manufacturing, Laser Processing and Biomedical Industries.

Specification Snapshot
Travel
20 mm
Accuracy
±1 µm
Maximum Speed [source isolated 2 at speed/acceleration boundary;exponent ownership not assigned]
10mm/s
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Overview

VZT Vertical Translation Stages Provide Micrometer-Accuracy Vertical Motion for Light- or Heavy-Load Applications. Their Precise, Fast Positioning Suits Semiconductor Manufacturing, Laser Processing and Biomedical Industries.

Specifications

ParameterValue
Travel20 mm
Accuracy±1 µm
Repeatability (Bi-Directional)±0.15 µm
Resolution (Minimum Incremental Motion)0.1 um
Straightness & Flatness±2 µm
Pitch15 arc sec
Yaw15 arc sec
Maximum Speed [source isolated 2 at speed/acceleration boundary;exponent ownership not assigned]10mm/s
Maximum Acceleration [No Load;source isolated 2 at speed/acceleration boundary;exponent ownership not assigned]5m/s
In-Position Stability<2 nm
Maximum Force (Continuous)80 N
Center Load Capacity4 kg
Stage Mass3.0 kg
MaterialBlack Aluminum Body
MTBF (Mean Time Between Failure)20,000

Key Features

30mm Vertical Travel in a Compact Device; Vertical Anti-Creep Crossed-Roller Bearings for Ripple-Free Motion and Excellent Trajectory Accuracy; Integrated High-Precision Linear Encoder for High Repeatability and Positioning Accuracy.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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VZT-I Vertical Lift Stage VZT-I-20
Nano-stage · Motorized Stages
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