VARS Air Bearing Rotary Stage VARS300

VARS Air Bearing Rotary Stage VARS300

Supplier
Nano-stage
Part Number
VARS300
Category
Motorized Stages
Origin
China

VAR series air-bearing rotary stages offer ultrahigh rotational accuracy, stable constant-speed operation, extremely low axial and radial runout, and high rigidity. They result from continuous optimization using the development team's expertise in materials, structures and simulation analysis. Noncontact air bearings enable frictionless rotation, allowing VAR stages to achieve submicron angular accuracy.

Specification Snapshot
Width
300 mm
Height
110 mm
Max Speed
500 rpm
Accuracy
±2 arc sec
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Overview

VAR series air-bearing rotary stages offer ultrahigh rotational accuracy, stable constant-speed operation, extremely low axial and radial runout, and high rigidity. They result from continuous optimization using the development team's expertise in materials, structures and simulation analysis. Noncontact air bearings enable frictionless rotation, allowing VAR stages to achieve submicron angular accuracy.

Specifications

ParameterValue
Width300 mm
Tabletop Diameter278.1 mm
Height110 mm
Aperture75 mm
Total Travel360°Continuous
Bus Voltage300 VDC
Fundamental Encoder Resolution18000 lines/rev
Max Speed500 rpm
Accuracy±2 arc sec
Repeatability (Bi-Directional)<1 arc sec
Max Load [Axial]100 kg
Max Load [Radial]50 kg
Max Load [Tilt]45 N-m
Axial Error Motion [first Error Motion group in source;no further qualifier]<100 nm
Radial Error Motion [first Error Motion group in source;no further qualifier]<250 nm
Tilt Error Motion [first Error Motion group in source;no further qualifier]<0.5 arc sec
Axial Error Motion [second Error Motion group in source;no further qualifier]<20 nm
Radial Error Motion [second Error Motion group in source;no further qualifier]<20 nm
Tilt Error Motion [second Error Motion group in source;no further qualifier]<0.04 arc sec
Operating Pressure0.5MPa ±0.05MPa
Air Consumption<2 SCFM
Inertia [Unloaded;source kg-mm with displaced 2 marker and line breaks, unit not inferred]10300
Total Mass24.3 kg
MaterialBlack Aluminum Body

Key Features

Air-Bearing Rotary Table; Direct-Drive Brushless Slotless Servo Motor; Zero Cogging for High Speed Stability; Low Motion Error and High Stable Accuracy; High-Precision Rotary Encoder; Flat, Compact Design; No Mechanical Contact.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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VARS Air Bearing Rotary Stage VARS300
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