VARS Air Bearing Rotary Stage VARS200
VAR series air-bearing rotary stages offer ultrahigh rotational accuracy, stable constant-speed operation, extremely low axial and radial runout, and high rigidity. They result from continuous optimization using the development team's expertise in materials, structures and simulation analysis. Noncontact air bearings enable frictionless rotation, allowing VAR stages to achieve submicron angular accuracy.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Width | 200 mm |
| Tabletop Diameter | 178.1 mm |
| Height | 90 mm |
| Aperture | 20 mm |
| Total Travel | 360°Continuous |
| Bus Voltage | 300 VDC |
| Fundamental Encoder Resolution | 8192 lines/rev |
| Max Speed | 300 rpm |
| Accuracy | ±2 arc sec |
| Repeatability (Bi-Directional) | <1 arc sec |
| Max Load [Axial] | 30 kg |
| Max Load [Radial] | 15 kg |
| Max Load [Tilt] | 10 N-m |
| Axial Error Motion [first Error Motion group in source；no further qualifier] | <100 nm |
| Radial Error Motion [first Error Motion group in source；no further qualifier] | <250 nm |
| Tilt Error Motion [first Error Motion group in source；no further qualifier] | <0.7 arc sec |
| Axial Error Motion [second Error Motion group in source；no further qualifier] | <20 nm |
| Radial Error Motion [second Error Motion group in source；no further qualifier] | <20 nm |
| Tilt Error Motion [second Error Motion group in source；no further qualifier] | <0.06 arc sec |
| Operating Pressure | 0.5MPa ±0.05MPa |
| Air Consumption | <2 SCFM |
| Inertia [Unloaded；source kg-mm with displaced 2 marker and line breaks, unit not inferred] | 13850 |
| Total Mass | 9.0 kg |
| Material | Black Aluminum Body |
Key Features
Datasheet
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