VALI Air Bearing Linear Stage VALI100
The VAL series is an air-bearing linear stage for high-precision, high-end applications. The development team's expertise in materials, design and analysis supports continuous optimization of the entire platform. Noncontact air bearings with magnetic preload provide smooth, frictionless motion, enabling submicron-to-nanometer positioning accuracy and repeatability.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Total Travel | 100 mm |
| Motor Type | Brushless Linear Servomotor |
| Feedback [Noncontact Linear Encoder] | 0.5nm–10nm |
| Maximum Speed [source isolated 2 at speed/acceleration row boundary；exponent ownership not assigned] | 300mm/s |
| Maximum Acceleration [no-load；source isolated 2 at speed/acceleration row boundary；exponent ownership not assigned] | 10m/s |
| Maximum Load | 15 kg |
| Accuracy [with error compensation, temperature stabilized within 0.2°C] | ±0.3 µm |
| Repeatability | ±50 nm |
| Straightness & Flatness | ±0.4 µm |
| Pitch/Yaw | ±1.0 arc sec |
| Minimum incremental motion Capacity | Standard:10nm; Optional:1nm |
| Nominal Stage Mass | 7 kg |
| Moving Mass | 2 kg |
| Operating Pressure | 0.5MPa ±0.05MPa |
| Air Consumption | 0.8 SCFM |
| Material | Aluminum |
| MTBF | 20,000 |
Key Features
Datasheet
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