VAL II Air Bearing Linear Stage VALII100
The VAL series is an air-bearing linear stage for high-precision, high-end applications. The development team's expertise in materials, design and analysis supports continuous optimization of the entire platform. Noncontact air bearings with magnetic preload provide smooth, frictionless motion, enabling submicron-to-nanometer positioning accuracy and repeatability.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Total Travel | 100 mm |
| Motor Type | Brushless Linear Servomotor |
| Feedback | Noncontact Linear Encoder or Laser Interferometer |
| Encoder [Noncontact Linear Encoder] | 0.001µm–0.1µm |
| Encoder [Laser Interferometer] | 0.39nm–79nm |
| Maximum Velocity [no-load；source isolated 2 at velocity/acceleration row boundary；exponent ownership not assigned] | 2m/s |
| Peak Acceleration [no-load；source isolated 2 at velocity/acceleration row boundary；exponent ownership not assigned] | 20m/s |
| Maximum Load Capacity | 50 kg |
| Accuracy [Noncontact Linear Encoder；with error compensation, temperature stabilized within 0.2°C] | ±0.3 µm |
| Repeatability | ±0.2 µm |
| Straightness & Flatness | ±0.25 µm |
| Pitch/Yaw | 1 arc sec |
| Velocity ripple [@500mm/s] | 0.1% |
| Minimum incremental motion | 10 nm |
| Nominal Stage Mass | 30 kg |
| Moving Mass | 8.5 kg |
| Operating Pressure | 0.5MPa ±0.05MPa |
| Air Consumption | 0.8 SCFM |
| Material | Aluminum |
| MTBF | 20,000 |
Key Features
Datasheet
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