VAG Marble Gantry Structure
XiviTech developed VAG motion platforms through years of investment in quality materials, proprietary machining, and precision structural analysis and design, helping semiconductor-equipment manufacturers achieve high accuracy and throughput. Extensive proprietary intellectual property and an expert R&D team support continued technical leadership. VAG platforms meet demanding electronics and semiconductor processing and inspection requirements.
Save to Favorites
Overview
Specifications
| Parameter | Value |
|---|---|
| Travel [Scan Axis] | 350 mm , 500 mm |
| Travel [Step Axis] | 350 mm , 500 mm |
| Drive System | Linear Brushless Motor |
| Resolution | 0.25 nm |
| Accuracy | ±300 nm |
| Repeatability（choose linear driver） | ±100 nm (±50 nm) |
| XYZ Position Stability（Air On） | 20 nm |
| Granite Base Thickness | 250 mm |
| Rated Payload(Maintaining Dynamic Specifications) | 5 kg |
| Maximum Payload | 25 kg |
| Maximum Velocity with Rated Payload [Scan & Step Axis] | 1000 mm/s |
| Peak Acceleration with Rated Payload [Scan & Step Axis] | 2 G (20 m/s2) |
| RMS Acceleration with Rated Load [Scan & Step Axis] | 1 G (10 m/s2) |
| Stiffness,First Natural Frequency with Rated Payload | >100 Hz |
| Pitch | 2 arc sec |
| Roll | 2 arc sec |
| Yaw | 2 arc sec |
| XY straightness | 1 um |
| XY Flatness | 1.2 um |
| XY Orthogonality | <2 arc sec |
| Velocity ripple( sampled at 400mm/s) [sampled at 400mm/s；sampled at 400mm/s] | 0.1 % |
| MTBF | 40,000 hours |
Key Features
Datasheet
Please provide your email to download the datasheet.
Invalid email format. Please try again.
Supplier Information
Related Products
-
ML2Z0525UC-MPWIR
Motorized Stages
Daheng-imaging
Models Supporting the Autofocus Version: ML2Z0525R2C-MPWIR-IX0 Focusing Type: Motorized Zoom Resolution: 9M
Computar LensConnect Series 2/3-Inch 9000000-Pixel Motorized Lens
-
STL-LEDRFAA8 Upright 8-Position Motorized Fluorescence Module
Motorized Stages
Situoli
Light Source: Adjustable LED Service Life: >60000 小时 Light-Intensity Control Range: 0~99% Linear Adjustment
SITUOLI LED fluorescence illumination uses bright LEDs to reveal weak signals and offers observation comparable to advanced inverted fluorescence microscopes for varied dyes. Stable, efficient illumination and a short optical path improve brightness, excitation and detection; adjustable intensity reduces photobleaching. Unlike aging mercury lamps requiring calibration for comparisons over time, stable LEDs allow accurate comparisons. Life is60,000hours, stated as about20years at eight hours/day, versus about400 for mercury and2000 for metal halide, saving approximately90% or more in maintenance. Linear intensity adjustment and exact stored settings ensure repeatability. Intelligent temperature/humidity control monitors/displays values and automatically adjusts the internal environment for long-term stability. Live status simplifies operation; controlled intensity protects valuable samples. Actual hours are accurately displayed rather than overstated, with multiple data aiding research.
-
STL-IXRFAA8 Inverted 8-Position Motorized Fluorescence Module
Motorized Stages
Situoli
Light Source [Green Region Contains Parameters of the Optional STL-BLE040 Fluorescence Light Source]: Adjustable LED Service Life [Green Region Contains Parameters of the Optional STL-BLE040 Fluorescence Light Source]: >60000 小时 Light-Intensity Control Range [Green Region Contains Parameters of the Optional STL-BLE040 Fluorescence Light Source]: 0~99% Linear Adjustment
This LED fluorescence illumination unit uses integrated bright LEDs to reveal weak fluorescence. Switching excitation blocks by handle selects the matching LED. Freely adjustable linear intensity compensates for channel/dye efficiency; stored per-channel settings ensure repeatability. With multiband blocks, software selects source channels and brightness independently under equal exposure/gain for efficiency. Duty-cycle control reduces phototoxicity for long-term live-cell imaging; frequency control synchronizes exposure for millisecond/microsecond temporal resolution. Blocks are added/replaced through the module's right window, followed by software channel selection and one-click self-test. Mercury lamps dim with age and need calibration for time-separated comparisons; stable LEDs allow accurate comparison. Life is 60,000 hours, stated as about 20 years at eight hours/day, versus about 400 for mercury and 2000 for metal halide, saving approximately 90% or more in maintenance.
-
Motorized Stage STL-HSG3000
Motorized Stages
Situoli
Travel Range: 118 mm × 76 mm Travel Speed [4mm ball screw pitch]: Max.150 Repeat Positioning / Repeatability [Bidirectional]: Bidirectional <1
Precision Motorized Microscope Stage for Research,Industry/Biomedicine,Accurate Automatic Movement/Positioning Improves Efficiency/Repeatability,Long Observation,Stitching,Dynamic Samples.
-
Linear Motor Module STB Series
Motorized Stages
Xzyim
Related Articles
As a top‑tier supplier of tunable laser chips, Shandong Zhongxin Optoelectronics Technology Company has newly launched the world’s first budget‑friendly fiber‑Bragg‑grating (FBG) demodulator and scanning module.
Semiconductor laser diodes are essential light sources for industrial sensing, LiDAR and laser printing. Many engineers waste time picking mismatched models. We summarize 4 simple selection standards, plus a mature industrial product: HGLD-790TO5.6-ZSP-10mW from HAUCORE.
Founded in 2003, BWT Beijing Optoelectronics adheres to the mission "Let Dreams Fly With Light" and vision of becoming a Global Leader in Laser Solutions, guided by the core value "Innovate to Achieve Extraordinary".
Founded in November 2017, TIANJIN H‑CHIP TECHNOLOGY GROUP CORPORATION is a professional manufacturing‑service provider dedicated to micro‑nano optoelectronic chips. It holds multiple prestigious qualifications, including National High‑Tech Enterprise, one of Tianjin’s first Gazelle‑certified Enterprises, Specialized‑Refined‑Differentiated‑Innovative SME, and Leading Enterprise for Strategic Emerging Industries.
Loading...
Name
Phone
Organization
Use Case
Database Platform