A-μSCAN
Three- or four-axis marble motion platform. Standard models support light customization. The new A-μSCAN integrated high-performance scanning system uses a highly rigid granite base, high-performance linear motors and servo stages for precision scanning, machining and inspection. Standard travel options enable quick shipment and reduce assembly defects and performance limitations caused by unfamiliar component combinations or adjustment. Ideal for complex multiple-degree-of-freedom motion in limited space.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Standard Axis Model [Y Axis; from bottom to top; standard axis U1LM320-XX] | U1LM320-XX |
| Travel [Y Axis; from bottom to top; standard axis U1LM320-XX] | 100/200/300/400 |
| Repeatability [Y Axis; from bottom to top; standard axis U1LM320-XX] | ≤1um（±0.5） |
| Maximum Speed*2 [Y Axis; from bottom to top; standard axis U1LM320-XX] | 1000mm/s |
| Maximum load [Y Axis; from bottom to top; standard axis U1LM320-XX] | 50kg |
| Motion Flatness [Y Axis; from bottom to top; standard axis U1LM320-XX] | ≤±5um |
| Grating resolution [Y Axis; from bottom to top; standard axis U1LM320-XX] | 100nm |
| Motor Thrust [Y Axis; from bottom to top; standard axis U1LM320-XX] | 220N/440N (Peak) |
| Standard Axis Model [X Axis; From Bottom to Top; Standard Axis U1LM240-XX] | U1LM240-XX |
| Travel [X Axis; From Bottom to Top; Standard Axis U1LM240-XX] | 100/200/300/400 |
| Repeatability [X Axis; From Bottom to Top; Standard Axis U1LM240-XX] | ≤1um（±0.5） |
| Maximum Speed*2 [X Axis; From Bottom to Top; Standard Axis U1LM240-XX] | 1000mm/s |
| Maximum load [X Axis; From Bottom to Top; Standard Axis U1LM240-XX] | 50kg |
| Motion Flatness [X Axis; From Bottom to Top; Standard Axis U1LM240-XX] | ≤±5um |
| Grating resolution [X Axis; From Bottom to Top; Standard Axis U1LM240-XX] | 100nm |
| Motor Thrust [X Axis; From Bottom to Top; Standard Axis U1LM240-XX] | 330N/660N (Peak) |
| Standard Axis Model [R Axis; From Bottom to Top; Standard Axis DDR224] | DDR224 |
| Travel [R Axis; From Bottom to Top; Standard Axis DDR224] | 360° |
| Repeatability [R Axis; From Bottom to Top; Standard Axis DDR224] | ≤±1sec |
| Maximum Speed*2 [R Axis; From Bottom to Top; Standard Axis DDR224] | 4rps |
| Maximum load [R Axis; From Bottom to Top; Standard Axis DDR224] | 50kg |
| Motion Flatness [R Axis; From Bottom to Top; Standard Axis DDR224] | ≤5um |
| Grating resolution [R Axis; From Bottom to Top; Standard Axis DDR224] | 1sec |
| Motor Thrust [R Axis; From Bottom to Top; Standard Axis DDR224] | 20Nm |
| Standard Axis Model [Z Axis; From Bottom to Top; Standard Axis U3SVM210-XX] | U3SVM210-XX |
| Travel [Z Axis; From Bottom to Top; Standard Axis U3SVM210-XX] | 50/100/200/300 |
| Repeatability [Z Axis; From Bottom to Top; Standard Axis U3SVM210-XX] | ≤3um（±1.5） |
| Maximum Speed*2 [Z Axis; From Bottom to Top; Standard Axis U3SVM210-XX] | 200mm/s |
| Maximum load [Z Axis; From Bottom to Top; Standard Axis U3SVM210-XX] | 30kg |
| Motion Flatness [Z Axis; From Bottom to Top; Standard Axis U3SVM210-XX] | ≤±5um |
Applications
Key Features
Datasheet
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