A-UMS130-X UMS130-60X

A-UMS130-X UMS130-60X

Supplier
Nano-stage
Part Number
UMS130-60X
Category
Motorized Stages
Origin
China

The A-UMS130-X series combines crossed-roller guides with a linear motor in a highly successful precision translation stage offering excellent value. Its short-travel configuration provides good straightness and rigidity, with closed-loop feedback from a linear grating scale. It is particularly suited to short-travel applications requiring ultraprecise positioning or small displacements and is an excellent choice for precision optical adjustment, assembly and machining.

Specification Snapshot
Travel
60 mm
Maximum Speed
300mm/s
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Overview

The A-UMS130-X series combines crossed-roller guides with a linear motor in a highly successful precision translation stage offering excellent value. Its short-travel configuration provides good straightness and rigidity, with closed-loop feedback from a linear grating scale. It is particularly suited to short-travel applications requiring ultraprecise positioning or small displacements and is an excellent choice for precision optical adjustment, assembly and machining.

Specifications

ParameterValue
Motor typeThree-Phase Ironless Motor
Grating TypeIncremental Grating 0.1um (Optional Grating up to 1nm, Absolute Type Optional)
Motor ThrustRated 40N, Peak 90N
Acceleration [No Load]3G
Limit TypeMechanical, Photoelectric and Software (Triple Limit Protection)
Material6061-T6 Aluminum Alloy (Stainless Steel Optional)
Travel60 mm
Positioning Accuracy±3um (Calibrated ±0.5um)
Repeatability±0.1um (±50nm with Grating Encoder of 5nm or Higher)
Maximum Speed300mm/s
Maximum load6 kg

Key Features

Linear Guides Have Excellent Flatness and Straightness; Linear Motor Ensures System Rigidity and Dynamic Performance; Quiet, Smooth Operation with Extremely Low Noise and Very High Precision.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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A-UMS130-X UMS130-60X
Nano-stage · Motorized Stages
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