A-MiniSCAN
The A-MiniSCAN series is our recently introduced high-precision desktop scanning system. A highly stable marble base, high-precision XY and Z motion stages, and provisions for optical-path mounting and illumination allow rapid assembly into various customer-specific applications. Successful high-precision applications already include semiconductor wafer scanning, biological inspection and interferometric measurement.
Specification Snapshot
Maximum Speed [XY-Axis Option MSST-8IN-EN]
50mm/s
Maximum Speed [XY Axes option MSLM-8IN-EA10]
300mm/s
Travel [Z Axis option MSST-Z100-ER100]
100mm
Maximum Speed [Z Axis option MSST-Z100-ER100]
20mm/s
Travel [Z Axis option MSLM-Z100-EA10]
100mm
Maximum Speed [Z Axis option MSLM-Z100-EA10]
100mm/s
Request a Quote
Download Datasheet
Overview
The A-MiniSCAN series is our recently introduced high-precision desktop scanning system. A highly stable marble base, high-precision XY and Z motion stages, and provisions for optical-path mounting and illumination allow rapid assembly into various customer-specific applications. Successful high-precision applications already include semiconductor wafer scanning, biological inspection and interferometric measurement.
Specifications
| Parameter | Value |
|---|---|
| Standard Axis Model [XY-Axis Option MSST-8IN-EN] | MSST-8IN-EN |
| Travel [XY-Axis Option MSST-8IN-EN] | 205mm x 205mm |
| Grating resolution [XY-Axis Option MSST-8IN-EN] | Open Loop |
| Repeatability [XY-Axis Option MSST-8IN-EN] | ≤±2um |
| Maximum Speed [XY-Axis Option MSST-8IN-EN] | 50mm/s |
| Maximum load [XY-Axis Option MSST-8IN-EN] | 10kg |
| Minimum Step Size [XY Axes option MSST-8IN-EN; Theoretical Value] | 100nm (Theoretical) |
| Motion Flatness [XY-Axis Option MSST-8IN-EN] | ±3um |
| Standard Axis Model [XY Axes option MSLM-8IN-EA10] | MSLM-8IN-EA10 |
| Travel [XY Axes option MSLM-8IN-EA10] | 205mm x 205mm |
| Grating resolution [XY Axes option MSLM-8IN-EA10] | 10nm Absolute |
| Repeatability [XY Axes option MSLM-8IN-EA10] | ≤±200nm |
| Maximum Speed [XY Axes option MSLM-8IN-EA10] | 300mm/s |
| Maximum load [XY Axes option MSLM-8IN-EA10] | 10kg |
| Minimum Step Size [XY Axes option MSLM-8IN-EA10] | 20nm |
| Motion Flatness [XY Axes option MSLM-8IN-EA10] | ±3um |
| Standard Axis Model [Z Axis option MSST-Z100-ER100] | MSST-Z100-ER100 |
| Travel [Z Axis option MSST-Z100-ER100] | 100mm |
| Grating resolution [Z Axis option MSST-Z100-ER100] | 50nm Incremental |
| Repeatability [Z Axis option MSST-Z100-ER100] | ≤±300nm |
| Maximum Speed [Z Axis option MSST-Z100-ER100] | 20mm/s |
| Maximum load [Z Axis option MSST-Z100-ER100] | 8kg |
| Minimum Step Size [Z Axis option MSST-Z100-ER100] | 100nm |
| Motion Flatness [Z Axis option MSST-Z100-ER100] | ±1.5um |
| Standard Axis Model [Z Axis option MSLM-Z100-EA10] | MSLM-Z100-EA10 |
| Travel [Z Axis option MSLM-Z100-EA10] | 100mm |
| Grating resolution [Z Axis option MSLM-Z100-EA10] | 10nm Absolute |
| Repeatability [Z Axis option MSLM-Z100-EA10] | ≤±200nm |
| Maximum Speed [Z Axis option MSLM-Z100-EA10] | 100mm/s |
| Maximum load [Z Axis option MSLM-Z100-EA10] | 8kg |
| Minimum Step Size [Z Axis option MSLM-Z100-EA10] | 20nm |
| Motion Flatness [Z Axis option MSLM-Z100-EA10] | ±1.5um |
Applications
For Wafer Adjustment in Semiconductor Inspection, Optical Inspection and Optical Path Adjustment
Key Features
Standard desktop vibration isolation system. Three axes can use high-precision linear motor stages or highly stable stepper motor stages. The drive and control system is integrated into the machine structure, with no separate control box. Custom illumination and imaging assemblies are optional. An optional high-precision distance measurement module enables 0.2um-level autofocus. Standard control software is optional, with a comprehensive, convenient development kit also available.
Datasheet
Please provide your email to download the datasheet.
Your name
Email Address
Invalid email format. Please try again.
Send Request
Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
Contact Us
Loading...
GetExperimental Plan
Name
Phone
+86
Organization
Use Case

Global Photonics Products
Database Platform
Database Platform
With 16 years of experience, we provide high-quality products and services to universities, research institutes, and industry.
50+ Detailed Categories · 3,000+ Global Brands · 100,000+ Photonics Products
1 Million+
In-depth analysis of professional academic resources in photonics
300,000
ProductsDatasheets Available Free
We will keep your personal information strictly confidential.
Product Quote
+86
* Select the quoting party:
By submitting, you agree to the User Service Agreement and Privacy Policy