A-MiniSCAN

A-MiniSCAN

Supplier
Nano-stage
Category
Motorized Stages
Origin
China

The A-MiniSCAN series is our recently introduced high-precision desktop scanning system. A highly stable marble base, high-precision XY and Z motion stages, and provisions for optical-path mounting and illumination allow rapid assembly into various customer-specific applications. Successful high-precision applications already include semiconductor wafer scanning, biological inspection and interferometric measurement.

Specification Snapshot
Maximum Speed [XY-Axis Option MSST-8IN-EN]
50mm/s
Maximum Speed [XY Axes option MSLM-8IN-EA10]
300mm/s
Travel [Z Axis option MSST-Z100-ER100]
100mm
Maximum Speed [Z Axis option MSST-Z100-ER100]
20mm/s
Travel [Z Axis option MSLM-Z100-EA10]
100mm
Maximum Speed [Z Axis option MSLM-Z100-EA10]
100mm/s
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Overview

The A-MiniSCAN series is our recently introduced high-precision desktop scanning system. A highly stable marble base, high-precision XY and Z motion stages, and provisions for optical-path mounting and illumination allow rapid assembly into various customer-specific applications. Successful high-precision applications already include semiconductor wafer scanning, biological inspection and interferometric measurement.

Specifications

ParameterValue
Standard Axis Model [XY-Axis Option MSST-8IN-EN]MSST-8IN-EN
Travel [XY-Axis Option MSST-8IN-EN]205mm x 205mm
Grating resolution [XY-Axis Option MSST-8IN-EN]Open Loop
Repeatability [XY-Axis Option MSST-8IN-EN]≤±2um
Maximum Speed [XY-Axis Option MSST-8IN-EN]50mm/s
Maximum load [XY-Axis Option MSST-8IN-EN]10kg
Minimum Step Size [XY Axes option MSST-8IN-EN; Theoretical Value]100nm (Theoretical)
Motion Flatness [XY-Axis Option MSST-8IN-EN]±3um
Standard Axis Model [XY Axes option MSLM-8IN-EA10]MSLM-8IN-EA10
Travel [XY Axes option MSLM-8IN-EA10]205mm x 205mm
Grating resolution [XY Axes option MSLM-8IN-EA10]10nm Absolute
Repeatability [XY Axes option MSLM-8IN-EA10]≤±200nm
Maximum Speed [XY Axes option MSLM-8IN-EA10]300mm/s
Maximum load [XY Axes option MSLM-8IN-EA10]10kg
Minimum Step Size [XY Axes option MSLM-8IN-EA10]20nm
Motion Flatness [XY Axes option MSLM-8IN-EA10]±3um
Standard Axis Model [Z Axis option MSST-Z100-ER100]MSST-Z100-ER100
Travel [Z Axis option MSST-Z100-ER100]100mm
Grating resolution [Z Axis option MSST-Z100-ER100]50nm Incremental
Repeatability [Z Axis option MSST-Z100-ER100]≤±300nm
Maximum Speed [Z Axis option MSST-Z100-ER100]20mm/s
Maximum load [Z Axis option MSST-Z100-ER100]8kg
Minimum Step Size [Z Axis option MSST-Z100-ER100]100nm
Motion Flatness [Z Axis option MSST-Z100-ER100]±1.5um
Standard Axis Model [Z Axis option MSLM-Z100-EA10]MSLM-Z100-EA10
Travel [Z Axis option MSLM-Z100-EA10]100mm
Grating resolution [Z Axis option MSLM-Z100-EA10]10nm Absolute
Repeatability [Z Axis option MSLM-Z100-EA10]≤±200nm
Maximum Speed [Z Axis option MSLM-Z100-EA10]100mm/s
Maximum load [Z Axis option MSLM-Z100-EA10]8kg
Minimum Step Size [Z Axis option MSLM-Z100-EA10]20nm
Motion Flatness [Z Axis option MSLM-Z100-EA10]±1.5um

Applications

For Wafer Adjustment in Semiconductor Inspection, Optical Inspection and Optical Path Adjustment

Key Features

Standard desktop vibration isolation system. Three axes can use high-precision linear motor stages or highly stable stepper motor stages. The drive and control system is integrated into the machine structure, with no separate control box. Custom illumination and imaging assemblies are optional. An optional high-precision distance measurement module enables 0.2um-level autofocus. Standard control software is optional, with a comprehensive, convenient development kit also available.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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