A-LMT-XY-200*200+NFZ10

A-LMT-XY-200*200+NFZ10

Supplier
Nano-stage
Category
Motorized Stages
Origin
China

The A-LMT-XY-200*200+NFZ10 series linear motor stage combines crossed-roller guides with a linear motor in a very low-profile design. Its straightness and flatness surpass conventional mechanical guides. It is particularly suitable for small-step or ultraprecise positioning and is an excellent choice for precision optical adjustment, assembly and machining.

Specification Snapshot
Positioning Accuracy [component LMT-XY-200X200]
±1 um
Straightness [component LMT-XY-200X200]
1um
Maximum Speed [component LMT-XY-200X200]
500mm/s
Travel [component NFZ10]
10 mm
Positioning Accuracy [component NFZ10]
±0.5 um
Straightness [component NFZ10]
1.5um
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Overview

The A-LMT-XY-200*200+NFZ10 series linear motor stage combines crossed-roller guides with a linear motor in a very low-profile design. Its straightness and flatness surpass conventional mechanical guides. It is particularly suitable for small-step or ultraprecise positioning and is an excellent choice for precision optical adjustment, assembly and machining.

Specifications

ParameterValue
Motor type [component LMT-XY-200X200]Three-Phase Ironless Motor
Grating resolution [component LMT-XY-200X200]Default 100nm Digital Output (Optional 1vpp Analog Output or Other Resolutions)
Motor Thrust [component LMT-XY-200X200]Continuous 60N/Peak 210N
Minimum Step Size [component LMT-XY-200X200]200nm
Travel [component LMT-XY-200X200]200 mm × 200 mm
Positioning Accuracy [component LMT-XY-200X200]±1 um
Flatness [component LMT-XY-200X200]10um
Straightness [component LMT-XY-200X200]1um
Maximum Speed [component LMT-XY-200X200]500mm/s
Motor type [component NFZ10]Voice Coil Motor
Grating resolution [component NFZ10]Default 100nm Digital Output (Optional 1vpp Analog Output or Other Resolutions)
Motor Thrust [component NFZ10]Continuous 30N/Peak 90N
Minimum Step Size [component NFZ10]200nm
Travel [component NFZ10]10 mm
Positioning Accuracy [component NFZ10]±0.5 um
Flatness [component NFZ10]8um
Straightness [component NFZ10]1.5um
Maximum Speed [component NFZ10]50mm/s
Repeatability [both component columns]±0.3 um
Maximum load [Z Axis with Pneumatic Constant-Force Counterbalance]5kg

Key Features

Linear Guides Have Excellent Flatness and Straightness; Linear Motor Ensures System Rigidity and Dynamic Performance; Quiet, Smooth Operation with Extremely Low Noise and Very High Precision.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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A-LMT-XY-200*200+NFZ10
Nano-stage · Motorized Stages
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