A-LMT-XY-200*200+ABVT-Z20
The A-LMT-XY-200*200+ABVT-Z20 linear-motor stage combines crossed-roller guides and linear motors for straightness and flatness beyond conventional mechanical guides. Its Z axis uses air bearings for excellent vertical motion. It suits tiny-step or ultraprecise positioning, including precision optical alignment, assembly and machining.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Motor type [component LMT-XY-200X200] | Three-Phase Ironless Motor |
| Grating resolution [component LMT-XY-200X200] | Default 100nm Digital |
| Motor Thrust [component LMT-XY-200X200] | Continuous 60N/Peak 210N |
| Minimum Step Size [component LMT-XY-200X200] | 200nm |
| Travel [component LMT-XY-200X200] | 200 mm × 200 mm |
| Positioning Accuracy [component LMT-XY-200X200] | ±1 um |
| Flatness [component LMT-XY-200X200] | 10um |
| Straightness [component LMT-XY-200X200] | 1um |
| Maximum Speed [component LMT-XY-200X200] | 500mm/s |
| Motor type [Component ABVT-Z20 (Air-Bearing Guide)] | Voice Coil Motor |
| Grating resolution [Component ABVT-Z20 (Air-Bearing Guide)] | 1vpp Interpolated Down to 5nm |
| Motor Thrust [Component ABVT-Z20 (Air-Bearing Guide)] | Continuous 27N/Peak 119N |
| Minimum Step Size [Component ABVT-Z20 (Air-Bearing Guide)] | 100nm |
| Travel [Component ABVT-Z20 (Air-Bearing Guide)] | 10 mm |
| Positioning Accuracy [Component ABVT-Z20 (Air-Bearing Guide)] | ±0.5 um |
| Flatness [Component ABVT-Z20 (Air-Bearing Guide)] | 5um |
| Straightness [Component ABVT-Z20 (Air-Bearing Guide)] | 1um |
| Maximum Speed [Component ABVT-Z20 (Air-Bearing Guide)] | 30mm/s |
| Repeatability [both component columns] | ±0.3 um |
| Maximum load [Z Axis with Pneumatic Constant-Force Counterbalance] | 5kg |
Key Features
Datasheet
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Supplier Information
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