A-HEX-S6.50.200-XXX
The hybrid serial-parallel TRIPOD structure uses linear stepper motors, lead screws and grating feedback to provide six-axis motion in three linear and three rotational directions. It precisely adjusts optical loads in all six axes. This design is intended for optical inspection with a large central opening.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Effective Travel [XY Axes] | ±100mm |
| Motor type [XY Axes] | Stepper Motor |
| Grating resolution [XY Axes] | 4.88nm（1vpp） |
| Minimum Step Size [XY Axes] | 50nm |
| Repeatability [XY Axes] | ±0.5um |
| Positioning Accuracy [XY Axes] | ±1um |
| Maximum Speed [XY Axes] | 100mm/s |
| Effective Travel [θX θY Axes] | ±3deg |
| Motor type [θX θY Axes] | Stepper Motor |
| Grating resolution [θX θY Axes] | 4.88nm（1vpp） |
| Minimum Step Size [θX θY Axes] | 0.01ec |
| Repeatability [θX θY Axes] | ±0.5sec |
| Positioning Accuracy [θX θY Axes] | ±2sec |
| Maximum Speed [θX θY Axes] | 30deg/sec |
| Effective Travel [Z Axis] | ±25mm |
| Motor type [Z Axis] | Stepper Motor |
| Grating resolution [Z Axis] | 4.88nm（1vpp） |
| Minimum Step Size [Z Axis] | 50nm |
| Repeatability [Z Axis] | ±0.3um |
| Positioning Accuracy [Z Axis] | ±1um |
| Maximum Speed [Z Axis] | 15mm/s |
| Effective Travel [θZ Axis] | 360deg |
| Motor type [θZ Axis] | Direct-Drive Motor |
| Grating resolution [θZ Axis] | 0.04sec |
| Minimum Step Size [θZ Axis] | 0.001sec |
| Repeatability [θZ Axis] | ±0.1sec |
| Positioning Accuracy [θZ Axis] | ±3sec |
| Maximum Speed [θZ Axis] | 4rps |
| Maximum load | Horizontal Load 300kg; Contact Manufacturer for Load in Vertical Use |
| Maximum Mass | Complete Unit Weight 750kg |
Datasheet
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