A-GLMT-XY
The A-GLMT-XY series linear motor stage combines a marble structure with a linear motor for high accuracy and excellent straightness and flatness. It is particularly suitable for small-step or ultraprecise positioning and is an excellent choice for precision optical adjustment, assembly and machining, with excellent motion performance in semiconductor inspection and microscopy.
Specification Snapshot
Maximum Speed
500mm/s
Repeatability [source configuration 250x250]
±0.5 um
Positioning Accuracy [source configuration 250x250]
±1 um
Straightness [source configuration 250x250]
1.5 um
Repeatability [source configuration 360x360]
±0.5 um
Positioning Accuracy [source configuration 360x360]
±1.5 um
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Overview
The A-GLMT-XY series linear motor stage combines a marble structure with a linear motor for high accuracy and excellent straightness and flatness. It is particularly suitable for small-step or ultraprecise positioning and is an excellent choice for precision optical adjustment, assembly and machining, with excellent motion performance in semiconductor inspection and microscopy.
Specifications
| Parameter | Value |
|---|---|
| Motor type | Three-Phase Iron-Core Motor |
| Grating resolution | sin\cos 4.88nm (Other Higher Resolutions Optional) |
| Upper-Axis Motor Thrust | Continuous 220N, Peak 440N |
| Lower-Axis Motor Thrust | Continuous 330N*2, Peak 660N*2 |
| Upper-Axis No-Load Acceleration [source acceleration row 1] | 4.5G |
| Upper-Axis No-Load Acceleration [source acceleration row 2] | 3G |
| Minimum Step Size [With nanopwm or Linear Driver] | 10nm |
| Maximum Speed | 500mm/s |
| Maximum load | 50kg |
| Travel [source configuration 250x250] | 250 mm × 250 mm |
| Repeatability [source configuration 250x250] | ±0.5 um |
| Positioning Accuracy [source configuration 250x250] | ±1 um |
| Flatness [source configuration 250x250] | ±2 um |
| Straightness [source configuration 250x250] | 1.5 um |
| Travel [source configuration 360x360] | 360 mm × 360 mm |
| Repeatability [source configuration 360x360] | ±0.5 um |
| Positioning Accuracy [source configuration 360x360] | ±1.5 um |
| Flatness [source configuration 360x360] | ±3 um |
| Straightness [source configuration 360x360] | 1.5 um |
Key Features
Marble and Linear Guides Have Excellent Flatness and Straightness; Iron-Core Linear Motor Ensures System Rigidity and Dynamic Performance; Quiet, Smooth Operation with Extremely Low Noise and Very High Precision.
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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