VXT130-XY Mechanical-Guide Linear Stage VXT130-110-XY-N
VXT series stages comprise linear crossed-roller bearings, a linear motor and a noncontact linear encoder. A centrally driven, ironless motor with zero cogging ensures smooth velocity control and further improves motion accuracy. The series offers excellent high-speed, high-accuracy performance.
Specification Snapshot
Travel
110 mm
Accuracy
±4µm
Maximum Speed
350 mm/s
Load Capacity [Horizontal]
10 kg
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Overview
VXT series stages comprise linear crossed-roller bearings, a linear motor and a noncontact linear encoder. A centrally driven, ironless motor with zero cogging ensures smooth velocity control and further improves motion accuracy. The series offers excellent high-speed, high-accuracy performance.
Specifications
| Parameter | Value |
|---|---|
| Travel | 110 mm |
| Accuracy | ±4µm |
| Resolution | 1 nm |
| Repeatability (Bi-Directional) | ±100nm |
| Repeatability (Uni-Directional) | ±25 nm |
| Straightness & Flatness | ±1.5 µm |
| Pitch | 12 arc sec |
| Yaw | 6 arc sec |
| Orthogonality | 10 arc sec |
| Maximum Speed | 350 mm/s |
| Maximum Acceleration (No Load) | 10 m/s² |
| In-Position Stability | <1 nm |
| Maximum Force (Continuous) | 22 N |
| Load Capacity [Horizontal] | 10 kg |
| Moving Mass [Upper] | 2.2 kg |
| Moving Mass [Lower] | 5.8 kg |
| Stage Mass | 7.8 kg |
| Material | Aluminum Body/Black Hardcoat Finish |
| MTBF (Mean Time Between Failure) | 20,000 |
Key Features
Highly Integrated XY Linear-Motor Nanostage with Nanometer Performance and Long Travel; High Resolution (1nm), Positioning Repeatability (75nm) and Positioning Accuracy (250nm); Low Motion Error, High Stable Accuracy and Anti-Creep Properties.
Datasheet
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Supplier Information
Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.
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