VXT130-XY Mechanical-Guide Linear Stage VXT130-060-XY-P

VXT130-XY Mechanical-Guide Linear Stage VXT130-060-XY-P

Supplier
Nano-stage
Part Number
VXT130-060-XY-P
Category
Manual Stages
Origin
China

VXT series stages comprise linear crossed-roller bearings, a linear motor and a noncontact linear encoder. A centrally driven, ironless motor with zero cogging ensures smooth velocity control and further improves motion accuracy. The series offers excellent high-speed, high-accuracy performance.

Specification Snapshot
Travel
60 mm
Accuracy
±250nm
Maximum Speed
350 mm/s
Load Capacity [Horizontal]
10 kg
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Overview

VXT series stages comprise linear crossed-roller bearings, a linear motor and a noncontact linear encoder. A centrally driven, ironless motor with zero cogging ensures smooth velocity control and further improves motion accuracy. The series offers excellent high-speed, high-accuracy performance.

Specifications

ParameterValue
Travel60 mm
Accuracy±250nm
Resolution1 nm
Repeatability (Bi-Directional)±75nm
Repeatability (Uni-Directional)±25 nm
Straightness & Flatness±1 µm
Pitch10 arc sec
Yaw5 arc sec
Orthogonality3 arc sec
Maximum Speed350 mm/s
Maximum Acceleration (No Load)10 m/s²
In-Position Stability<1 nm
Maximum Force (Continuous)22 N
Load Capacity [Horizontal]10 kg
Moving Mass [Upper]1.6 kg
Moving Mass [Lower]4.3 kg
Stage Mass5.6 kg
MaterialAluminum Body/Black Hardcoat Finish
MTBF (Mean Time Between Failure)20,000

Key Features

Highly Integrated XY Linear-Motor Nanostage with Nanometer Performance and Long Travel; High Resolution (1nm), Positioning Repeatability (75nm) and Positioning Accuracy (250nm); Low Motion Error, High Stable Accuracy and Anti-Creep Properties.

Datasheet

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Supplier Information

Na
Nano-stage
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Beijing Naz Precision Technology Co., Ltd. was established in 2018, located in Haidian District, Beijing. The company is dedicated to precision positioning equipment, providing piezoelectric ceramic nano positioning stages, large stroke nano positioning stages, air bearing rotary tables, multi-axis stages, laser interferometers, etc., widely applied in metrology, microscopy, life sciences, laser technology, and semiconductor fields. It is the authorized dealer of German Smaract in China, and independently develops linear motors and air bearing stages. Its AFM ultra-thin ultra-stable linear stage is unique in China, and high-precision air bearing platforms provide domestic high-performance displacement stages for semiconductor inspection.

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VXT130-XY Mechanical-Guide Linear Stage VXT130-060-XY-P
Nano-stage · Manual Stages
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