GALSAR Series Ultra-High-Precision Motorized Stage GALSAR-225-P-100-M1
Applications: GALSAR is an ultraprecision servo-driven motorized stage for laser processing, precision metrology and inspection, circuit-board manufacturing and inspection, and semiconductor manufacturing. Structure: robust mechanics, low-friction linear guides, a precision-ground ballscrew, optimized side seals, a rigid aerospace aluminum base, and a high-performance servo motor provide long life and consistent positioning. Precision: the high-performance servo motor and optional optical encoder achieve submicrometer repeatability. Customization and integration: many standard features and options accommodate diverse needs, accelerate system development, and greatly reduce design effort to improve efficiency. Note: accuracy is measured 25 mm above the load table. The quoted price excludes the controller.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | 100mm |
| Positioning Accuracy [Accuracy specifications measured 25mm above the load platform] | ±2.5μm / ±1.5μm |
| Bidirectional positioning repeatability [Accuracy specifications measured 25mm above the load platform] | ±1μm / ±0.75μm |
| Resolution | 50nm Standard AB-Phase Differential Digital Incremental Output / 1Vpp Sin/Cos (Typical=20μm/2048≈10nm) |
| Minimum incremental motion | 200nm / 100nm |
| Straightness [Accuracy specifications measured 25mm above the load platform] | ±2.5μm |
| Flatness [Accuracy specifications measured 25mm above the load platform] | ±2.5μm |
| Pitch [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Roll [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Yaw [Accuracy specifications measured 25mm above the load platform] | 6arc sec |
| Maximum Speed | 200mm/s |
| Maximum Acceleration | Dependent on Motor Performance, Driver Options and Load Mass |
| Load Capacity | 70kg / 35kg |
| Stage mass | 7.3kg |
| Platform Mass (Without Motor) | 21kg |
| Material | Aluminum，7075 |
| Measurement traceability | GB_T 17421.2-2016, 5 Round Trips, ≥5Plot/L |
| Mean Time Between Failures | 20000Hours |
| Drive motor | Servo Motor |
| Guidance type | Low-Friction Linear Guide |
| Lead Screw | Precision-Ground Ball Screw |
| Position feedback options [Optional] | Grating-scale closed-loop feedback |
| Dustproof Design | Side Seals Prevent Entry of Particulate Dust and Machining Debris |
| Series Brake Function [Page-level features; applicability to specific motor configurations has not been confirmed by the dynamic rows] | Motor Power-Off Brake |
| Environmental compatibility [Available] | Vacuum and Cleanroom |
Applications
Key Features
Datasheet
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Supplier Information
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