FBG500 Excimer Laser
Repetition rate adjustable from 1 - 500Hz
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Overview
Specifications
| Parameter | Value |
|---|---|
| Maximum Single-Pulse Energy [ArF；193nm] | 10 mJ |
| Maximum Single-Pulse Energy [KrF；248nm] | 16 mJ |
| Average Power [ArF；193nm] | 4 W |
| Average Power [KrF；248nm] | 12 W |
| Maximum Repetition Rate | 500 Hz |
| Pulse Width (FWHM, ns) | 7±3 ns |
| Energy Stability (sigma %) | 2 % |
| Spot Size (mm)(V*H)5.7 | （5.7±0.5）×（3.0±0.5） |
| Divergence (mrad)(V*H) | （2.25±0.5）×（1±0.5） |
| Product Dimensions (mm)(L*W*H) | 804.5 mm × 373 mm × 667 mm |
| Weight | 95 kg |
| Power Supply Requirements | 220V, 50Hz, 5A |
| Cooling Method | Water Cooling |
| Interaction-Control System | RS232 (LCD/PC) |
| Interaction-External Trigger | Electrical Signal |
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Datasheet
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