Nanopositioning Stage
The REI180LM series nanopositioning stages use high-rigidity sliding-friction bearing systems and non-contact direct drive technology, providing nanometer-level precise positioning throughout the full travel range with millisecond-level fast settling performance. They can be combined with other stage products to build high-performance multi-axis systems.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Straightness | < 1.5 μm |
| Flatness | < 2.5 μm |
| Roll | 8 arc secarc sec |
| Yaw | 5 arc secarc sec |
| Maximum Acceleration | 2 g (No Load) |
| Maximum Force (Continuous) | 95.2 N |
| Load Capacity (Horizontal) | 25 kg |
| Load Capacity (Side) | 20 kg |
| Traceability For Calibration | ISO230-2 or GB17421, 5 bi-directional runs |
Applications
Key Features
Datasheet
Supplier Information
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Sub-Micron Direct Drive Stage
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The SWI560LM Ite IV series sub-micron precision direct drive stage is the latest generation of sub-micron direct drive stages refined through continuous optimization. It delivers high accuracy and high dynamic performance, achieving nanometer-level minimum incremental motion and sub-micron bi-directional repeatability; after linear error compensation, bi-directional repeatability is up to better than 150 nm and positioning accuracy better than 300 nm. The stage is directly driven by a high-efficiency coreless linear motor with zero-clearance transmission and zero cogging, providing smooth motion and outstanding dynamic response. Using a long-life SP-grade rolling-friction guideway bearing system combined with a specially designed low-friction integrated side-sealing structure, it effectively prevents process debris, dust and obvious particles from entering the stage, improving service life; an optional positive-pressure air purge system makes it suitable for industrial applications such as high-dynamic laser processing. The product offers four travel options of 300/400/500/600 mm and two configurations, Base and Plus, with maximum speeds up to 2000 mm/s and a complete single-axis/multi-axis cable management solution; cleanroom, vacuum and low-temperature versions can be provided through special treatment.
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LMP series
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VC-B structure
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Flatness: ≤1.5mm/m² Size differential: ≤±1mm Gravity: ≥100µm
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VC-C Concrete Base
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