Nanopositioning Stage
The REI180LM series nanopositioning stages use high-rigidity sliding-friction bearing systems and non-contact direct drive technology, providing nanometer-level precise positioning throughout the full travel range with millisecond-level fast settling performance. They can be combined with other stage products to build high-performance multi-axis systems.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Straightness | < 1.5 μm |
| Flatness | < 2.5 μm |
| Roll | 8 arc secarc sec |
| Yaw | 5 arc secarc sec |
| Maximum Acceleration | 2 g (No Load) |
| Maximum Force (Continuous) | 95.2 N |
| Load Capacity (Horizontal) | 25 kg |
| Load Capacity (Side) | 20 kg |
| Traceability For Calibration | ISO230-2 or GB17421, 5 bi-directional runs |
Applications
Key Features
Datasheet
Supplier Information
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