Sub-Micron Direct Drive Stage
The SWI560LM Ite IV series sub-micron precision direct drive stage is the latest generation of sub-micron direct drive stages refined through continuous optimization. It delivers high accuracy and high dynamic performance, achieving nanometer-level minimum incremental motion and sub-micron bi-directional repeatability; after linear error compensation, bi-directional repeatability is up to better than 150 nm and positioning accuracy better than 300 nm. The stage is directly driven by a high-efficiency coreless linear motor with zero-clearance transmission and zero cogging, providing smooth motion and outstanding dynamic response. Using a long-life SP-grade rolling-friction guideway bearing system combined with a specially designed low-friction integrated side-sealing structure, it effectively prevents process debris, dust and obvious particles from entering the stage, improving service life; an optional positive-pressure air purge system makes it suitable for industrial applications such as high-dynamic laser processing. The product offers four travel options of 300/400/500/600 mm and two configurations, Base and Plus, with maximum speeds up to 2000 mm/s and a complete single-axis/multi-axis cable management solution; cleanroom, vacuum and low-temperature versions can be provided through special treatment.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Accuracy (Base) | <0.6 μm @300mm; <0.75 μm @400mm; <0.75 μm @500mm; <0.75 μm @600mm |
| Accuracy (Plus) | <350 nm @300mm; <400 nm @400mm; <400 nm @500mm; <400 nm @600mm |
| Resolution (Base) | 1Vpp Sin/Cos (typical recommended value = 20 μm/4096 ~ 5 nm) |
| Resolution (Plus) | 1Vpp Sin/Cos (typical recommended value = 20 μm/16384 ~ 1.2 nm) |
| Min. Incremental Motion (Base) | 40 nm |
| Min. Incremental Motion (Plus) | 35 nm |
| Bi-Directional Repeatability (Base) | <500 nm |
| Bi-Directional Repeatability (Plus) | <300 nm |
| Straightness | 1.5 μm |
| Flatness | 2.5 μm |
| Yaw | 6 arc secarc sec |
| Maximum Acceleration | 3 g |
| Maximum Force (Continuous) | 650 N |
| Load Capacity (Horizontal) | 150 kg |
| Load Capacity (Side) | 100 kg |
| Moving Mass | 26 kg |
| Traceability For Calibration | ISO230-2 or GB17421, 往返5次, ≥10Plot/L |
Key Features
Datasheet
Supplier Information
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